Epitaxial growth by atomic layer deposition and properties of high-k barium strontium titanate on Zintl-templated Ge (001) substrates

2022 ◽  
Vol 40 (1) ◽  
pp. 012401
Author(s):  
Thanh Tung Le ◽  
Chon Hei Lam ◽  
Agham B. Posadas ◽  
Alexander A. Demkov ◽  
John G. Ekerdt
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Atomic Layer ◽  
Barium Strontium ◽  
Layer Deposition ◽  
High K

Textured strontium titanate layers on platinum by atomic layer deposition

2012 ◽  
Vol 520 (21) ◽  
pp. 6535-6540 ◽  
Author(s):  
T. Blomberg ◽  
J. Anttila ◽  
S. Haukka ◽  
M. Tuominen ◽  
M. Lukosius ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Strontium Titanate ◽  
Atomic Layer ◽  
Layer Deposition

Atomic Layer Deposition of Zirconium-Based High-k Metal Gate Oxide: Effect of Si Containing Zr Precursor

2015 ◽  
Vol 15 (1) ◽  
pp. 382-385
Author(s):  
Jun Hee Cho ◽  
Sang-Ick Lee ◽  
Jong Hyun Kim ◽  
Sang Jun Yim ◽  
Hyung Soo Shin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Gate Oxide ◽  
Metal Gate ◽  
Layer Deposition ◽  
High K

scholarly journals Epitaxial Growth of MgxCa1–xO on GaN by Atomic Layer Deposition

Nano Letters ◽  
2016 ◽  
Vol 16 (12) ◽  
pp. 7650-7654 ◽  
Author(s):  
Xiabing Lou ◽  
Hong Zhou ◽  
Sang Bok Kim ◽  
Sami Alghamdi ◽  
Xian Gong ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer Deposition

Nucleation and growth process of atomic layer deposition platinum nanoparticles on strontium titanate nanocuboids

2017 ◽  
Vol 28 (18) ◽  
pp. 185704 ◽  
Author(s):  
Chuandao Wang ◽  
Linhua Hu ◽  
Kenneth Poeppelmeier ◽  
Peter C Stair ◽  
Laurence Marks
Keyword(s):  
Atomic Layer Deposition ◽  
Strontium Titanate ◽  
Platinum Nanoparticles ◽  
Growth Process ◽  
Atomic Layer ◽  
Nucleation And Growth ◽  
Layer Deposition
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