Optimal design and fabrication of ITO photonic crystal using e-beam patterned hydrogen silsesquioxane resist
2020 ◽
Vol 38
(2)
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pp. 022802
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2000 ◽
Vol 17
(6)
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pp. 1027
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2007 ◽
Vol 40
(21)
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pp. 6554-6558
2008 ◽
Vol 8
(13)
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pp. 2449-2455
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