Langmuir probe and optical emission studies of Ar, O2, and N2 plasmas produced by an electron cyclotron resonance microwave source

1992 ◽  
Vol 10 (5) ◽  
pp. 3119-3124 ◽  
Author(s):  
A. A. Shatas ◽  
Y. Z. Hu ◽  
E. A. Irene
Keyword(s):  
Langmuir Probe ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Optical Emission ◽  
Electron Cyclotron ◽  
Microwave Source ◽  
Emission Studies ◽  
Resonance Microwave

Electron-Cyclotron-Resonance Microwave Plasma Oxidation of Er1Ba2Cu3OySuperconductive Ceramics

1988 ◽  
Vol 27 (Part 2, No. 3) ◽  
pp. L411-L413 ◽  
Author(s):  
Shoichiro Minomo ◽  
Michio Taniguchi ◽  
Yuji Ishida ◽  
Masato Sugiyo ◽  
Tetsuro Takahashi ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Microwave Plasma ◽  
Electron Cyclotron ◽  
Plasma Oxidation ◽  
Resonance Microwave

Langmuir probe analysis of distributed electron cyclotron resonance silicon nitride deposition plasma

1998 ◽  
Vol 72 (12) ◽  
pp. 1448-1450 ◽  
Author(s):  
F. Delmotte ◽  
M. C. Hugon ◽  
B. Agius ◽  
A. M. Pointu ◽  
S. Teodoru
Keyword(s):  
Silicon Nitride ◽  
Langmuir Probe ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Probe Analysis
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