Infrared absorption and nuclear magnetic resonance studies of carbon nitride thin films prepared by reactive magnetron sputtering

1994 ◽  
Vol 12 (4) ◽  
pp. 1470-1473 ◽  
Author(s):  
Dong Li ◽  
Yip‐Wah Chung ◽  
Shengtian Yang ◽  
Ming‐Show Wong ◽  
Farshid Adibi ◽  
...  
Keyword(s):  
Thin Films ◽  
Nuclear Magnetic Resonance ◽  
Magnetic Resonance ◽  
Magnetron Sputtering ◽  
Infrared Absorption ◽  
Carbon Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Magnetic Resonance Studies ◽  
Nuclear Magnetic

Study of the thermal stability of carbon nitride thin films prepared by reactive magnetron sputtering

2000 ◽  
Vol 9 (2) ◽  
pp. 212-218 ◽  
Author(s):  
C. Fernández-Ramos ◽  
M.J. Sayagués ◽  
T.C. Rojas ◽  
M.D. Alcalá ◽  
C. Real ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Thermal Stability Of

Characterisation of carbon nitride thin films prepared by reactive magnetron sputtering

Carbon ◽  
1998 ◽  
Vol 36 (5-6) ◽  
pp. 761-764 ◽  
Author(s):  
A. Fernández ◽  
J.C. Sánchez-López ◽  
G. Lassaletta
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Nuclear magnetic resonance studies of amorphous deuterated silicon nitride thin films

1996 ◽  
Vol 198-200 ◽  
pp. 77-80 ◽  
Author(s):  
P. Santos-Filho ◽  
G. Stevens ◽  
G. Lucovsky ◽  
T. Cull ◽  
P. Fedders ◽  
...  
Keyword(s):  
Thin Films ◽  
Nuclear Magnetic Resonance ◽  
Silicon Nitride ◽  
Magnetic Resonance ◽  
Magnetic Resonance Studies ◽  
Nuclear Magnetic
Sign in / Sign up

Export Citation Format

Share Document