Study of the thermal stability of carbon nitride thin films prepared by reactive magnetron sputtering

2000 ◽  
Vol 9 (2) ◽  
pp. 212-218 ◽  
Author(s):  
C. Fernández-Ramos ◽  
M.J. Sayagués ◽  
T.C. Rojas ◽  
M.D. Alcalá ◽  
C. Real ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Thermal Stability Of

Thermal stability of alumina thin films containing γ-Al2O3 phase prepared by reactive magnetron sputtering

2010 ◽  
Vol 257 (3) ◽  
pp. 1058-1062 ◽  
Author(s):  
J. Musil ◽  
J. Blažek ◽  
P. Zeman ◽  
Š. Prokšová ◽  
M. Šašek ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Al2o3 Phase ◽  
Thermal Stability Of

Characterisation of carbon nitride thin films prepared by reactive magnetron sputtering

Carbon ◽  
1998 ◽  
Vol 36 (5-6) ◽  
pp. 761-764 ◽  
Author(s):  
A. Fernández ◽  
J.C. Sánchez-López ◽  
G. Lassaletta
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Thermal Stability of TiZrAlN and TiZrSiN Films Formed by Reactive Magnetron Sputtering

2018 ◽  
Vol 9 (3) ◽  
pp. 418-426 ◽  
Author(s):  
G. Abadias ◽  
A. Yu. Daniliuk ◽  
I. A. Solodukhin ◽  
V. V. Uglov ◽  
S. V. Zlotsky
Keyword(s):  
Thermal Stability ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Thermal Stability Of
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