Influence of growth conditions on the residual strain in thick metalorganic vapor phase epitaxy grown InGaAs epilayers

1997 ◽  
Vol 15 (1) ◽  
pp. 43-47 ◽  
Author(s):  
P. Maigné
Keyword(s):  
Vapor Phase ◽  
Residual Strain ◽  
Growth Conditions ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy

scholarly journals Thermodynamic analysis of semipolar GaN and AlN under metalorganic vapor phase epitaxy growth conditions

2019 ◽  
Vol 58 (SC) ◽  
pp. SC1014 ◽  
Author(s):  
Yuki Seta ◽  
Abdul Muizz Pradipto ◽  
Toru Akiyama ◽  
Kohji Nakamura ◽  
Tomonori Ito ◽  
...  
Keyword(s):  
Thermodynamic Analysis ◽  
Vapor Phase ◽  
Growth Conditions ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Semipolar Gan

Dependence of Crystal Quality on Residual Strain in Strain-Controlled Thin AlN Layer Grown by Metalorganic Vapor Phase Epitaxy

1999 ◽  
Vol 38 (Part 2, No. 11B) ◽  
pp. L1296-L1298 ◽  
Author(s):  
Yoshiyuki Ishihara ◽  
Jun Yamamoto ◽  
Makoto Kurimoto ◽  
Takayoshi Takano ◽  
Tohru Honda ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Residual Strain ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Crystal Quality

Triple-Period (TP)-A and CuPt-A Type Ordering in Al0.5In0.5As Grown by Metalorganic-Vapor-Phase-Epitaxy

1999 ◽  
Vol 583 ◽  
Author(s):  
Tohru Suzuki ◽  
Toshinari Ichihasfh ◽  
Masayoshi Tsuji
Keyword(s):  
Surface Reconstruction ◽  
Vapor Phase ◽  
Growth Conditions ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Surface Reconstructions ◽  
Movpe Growth

AbstractThe triple-period (TP)-A and CuPt-A type ordering, which have been so far reported only for MBE grown alloys, were observed, in addition to CuPt-B type ordering, in Al0.5In0.5As alloys grown by MOVPE at 500°C. This indicates that (2×3) and (1×2) surface reconstructions occur on the surface even during MOVPE growth, although the (2×1) surface reconstruction and CuPt-B type ordering are dominant for the growth conditions examined.

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