Kinetics of F atoms and fluorocarbon radicals studied by threshold ionization mass spectrometry in a microwave CF4 plasma

1997 ◽  
Vol 15 (6) ◽  
pp. 3120-3126 ◽  
Author(s):  
A. Tserepi ◽  
W. Schwarzenbach ◽  
J. Derouard ◽  
N. Sadeghi
2004 ◽  
Vol 147 (1) ◽  
pp. 17-24 ◽  
Author(s):  
Satoshi Matsuda ◽  
Hirotsugu Shimosato ◽  
Motoshige Yumoto ◽  
Takao Sakai

2003 ◽  
Vol 123 (2) ◽  
pp. 167-172 ◽  
Author(s):  
Satoshi Matsuda ◽  
Hirotsugu Shimosato ◽  
Motoshige Yumoto ◽  
Takao Sakai

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