Quantitative determination of dielectric thin-film properties on product wafers using infrared reflection-absorption spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581508 ◽

1998 ◽

Vol 16 (6) ◽

pp. 3490-3494 ◽

Author(s):

Thomas M. Niemczyk ◽

Lizhong Zhang ◽

David M. Haaland ◽

Kenneth J. Radigan

Keyword(s):

Thin Film ◽

Quantitative Determination ◽

Absorption Spectroscopy ◽

Film Properties ◽

Dielectric Thin Film ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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Infrared reflection-absorption spectroscopy of thin film structures

10.31274/rtd-180813-8858 ◽

1988 ◽

Author(s):

Steven James Finke

Keyword(s):

Thin Film ◽

Absorption Spectroscopy ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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Determination of the incorporation rate of PTFE particles in Au-Co-PTFE composite coatings by InfraRed Reflection Absorption Spectroscopy

Surface and Coatings Technology ◽

10.1016/s0257-8972(01)01297-x ◽

2001 ◽

Vol 145 (1-3) ◽

pp. 233-241 ◽

Author(s):

Z Serhal ◽

J Morvan ◽

P Berçot ◽

M Rezrazi ◽

J Pagetti

Keyword(s):

Absorption Spectroscopy ◽

Composite Coatings ◽

Incorporation Rate ◽

Ptfe Composite ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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Interaction of Sodium Dodecyl Sulfate with Dimyristoyl-sn-glycero-3-phosphocholine Monolayers Studied by Infrared Reflection Absorption Spectroscopy. A New Method for the Determination of Surface Partition Coefficients

The Journal of Physical Chemistry B ◽

10.1021/jp0499631 ◽

2004 ◽

Vol 108 (24) ◽

pp. 8371-8378 ◽

Author(s):

Annette Meister ◽

Andreas Kerth ◽

Alfred Blume

Keyword(s):

Sodium Dodecyl Sulfate ◽

Absorption Spectroscopy ◽

Partition Coefficients ◽

Sodium Dodecyl ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection ◽

Dodecyl Sulfate

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Quantitative Determination of Borophosphosilicate Glass Thin-Film Properties Using Infrared Emission Spectroscopy

Applied Spectroscopy ◽

10.1366/0003702991947397 ◽

1999 ◽

Vol 53 (7) ◽

pp. 822-828 ◽

Author(s):

Thomas M. Niemczyk ◽

Songbiao Zhang ◽

James E. Franke ◽

David M. Haaland

Keyword(s):

Thin Film ◽

Quantitative Determination ◽

Emission Spectroscopy ◽

Infrared Emission ◽

Film Properties ◽

Infrared Emission Spectroscopy ◽

Borophosphosilicate Glass

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Determination of Chain Orientation in the Monolayers of Amino-Acid-Derived Schiff Base at the Air−Water Interface Using in Situ Infrared Reflection Absorption Spectroscopy

Langmuir ◽

10.1021/la702017p ◽

2007 ◽

Vol 23 (22) ◽

pp. 11034-11041 ◽

Author(s):

Huijin Liu ◽

Wangen Miao ◽

Xuezhong Du

Keyword(s):

Schiff Base ◽

Absorption Spectroscopy ◽

Water Interface ◽

Chain Orientation ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection ◽

Air Water Interface

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Infrared reflection-absorption spectroscopy of Alq3 thin film on silver surface using synchrotron radiation

Applied Physics Letters ◽

10.1063/1.2768912 ◽

2007 ◽

Vol 91 (6) ◽

pp. 061922 ◽

Author(s):

Yoko Sakurai ◽

Shin-ichi Kimura ◽

Kazuhiko Seki

Keyword(s):

Thin Film ◽

Synchrotron Radiation ◽

Absorption Spectroscopy ◽

Silver Surface ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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The determination of the molecular order of chiral monolayers at the air-water interface by infrared reflection-absorption spectroscopy —A bridge between physico- and biochemistry

Thin Solid Films ◽

10.1016/s0040-6090(95)08425-8 ◽

1996 ◽

Vol 284-285 ◽

pp. 694-697 ◽

Author(s):

Heinrich Hühnerfuss ◽

Arne Gericke ◽

Volker Neumann ◽

Keith J. Stine

Keyword(s):

Absorption Spectroscopy ◽

Water Interface ◽

Molecular Order ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection ◽

Air Water Interface

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Molecular beam/infrared reflection-absorption spectroscopy apparatus for probing heterogeneously catalyzed reactions on functionalized and nanostructured model surfaces

Review of Scientific Instruments ◽

10.1063/1.5093487 ◽

2019 ◽

Vol 90 (5) ◽

pp. 053903 ◽

Author(s):

Smadar Attia ◽

Evan J. Spadafora ◽

Jens Hartmann ◽

Hans-Joachim Freund ◽

Swetlana Schauermann

Keyword(s):

Absorption Spectroscopy ◽

Molecular Beam ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection ◽

Model Surfaces ◽

Catalyzed Reactions

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Self-Assembled Carbon Nanotubes on Gold: Polarization-Modulated Infrared Reflection−Absorption Spectroscopy, High-Resolution X-ray Photoemission Spectroscopy, and Near-Edge X-ray Absorption Fine Structure Spectroscopy Study

Langmuir ◽

10.1021/la7030768 ◽

2008 ◽

Vol 24 (7) ◽

pp. 3235-3243 ◽

Author(s):

Natalia Kocharova ◽

Jarkko Leiro ◽

Jukka Lukkari ◽

Markku Heinonen ◽

Tomáš Skála ◽

...

Keyword(s):

Carbon Nanotubes ◽

Fine Structure ◽

High Resolution ◽

Absorption Spectroscopy ◽

Photoemission Spectroscopy ◽

Spectroscopy Study ◽

X Ray ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection ◽

X Ray Absorption

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Mechanism of Islet Amyloid Polypeptide Fibrillation at Lipid Interfaces Studied by Infrared Reflection Absorption Spectroscopy

Biophysical Journal ◽

10.1529/biophysj.107.110635 ◽

2007 ◽

Vol 93 (9) ◽

pp. 3132-3141 ◽

Author(s):

D.H.J. Lopes ◽

A. Meister ◽

A. Gohlke ◽

A. Hauser ◽

A. Blume ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Islet Amyloid Polypeptide ◽

Islet Amyloid ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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