Quantitative Determination of Borophosphosilicate Glass Thin-Film Properties Using Infrared Emission Spectroscopy

1999 ◽  
Vol 53 (7) ◽  
pp. 822-828 ◽  
Author(s):  
Thomas M. Niemczyk ◽  
Songbiao Zhang ◽  
James E. Franke ◽  
David M. Haaland
Keyword(s):  
Thin Film ◽  
Quantitative Determination ◽  
Emission Spectroscopy ◽  
Infrared Emission ◽  
Film Properties ◽  
Infrared Emission Spectroscopy ◽  
Borophosphosilicate Glass

scholarly journals Infrared Sensor For CVD Deposition Of Dielectric Films

1994 ◽  
Vol 341 ◽  
Author(s):  
Thomas M. Niemczyk ◽  
James E. Franke ◽  
Songbiao Zhang ◽  
David M. Haaland
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Phosphorus Content ◽  
Infrared Emission ◽  
Dielectric Films ◽  
Standard Errors ◽  
Film Sample ◽  
Film Properties ◽  
P Content ◽  
Borophosphosilicate Glass

AbstractInfrared emission (IRE) spectra were obtained from two borophosphosilicate glass (BPSG) thin-film sample sets. The first set consisted of 21 films deposited on undoped silicon wafers, and the second set consisted of 9 films deposited on patterned and doped (product) wafers. The IRE data were empirically modeled using partial least-squares calibration to simultaneously quantify four BPSG thin-film properties. The standard errors of the determinations when modeling the 21 monitor wafers were < 0.1 wt% for boron and phosphorus content, 36 Å for film thickness, and 1.9°C for temperature. The standard errors of the determinations based on the product wafers were 0.13 wt% each for B and P content, 120 Å for film thickness, and 5.9°C for temperature.

A fast method for determination of surface area of zeolite-based catalysts and zeolites using near infrared emission spectroscopy

2019 ◽  
Vol 11 (21) ◽  
pp. 2819-2825
Author(s):  
Jicarla Portela Rebouças ◽  
Jarbas José Rodrigues Rohwedder ◽  
Celio Pasquini
Keyword(s):  
Surface Area ◽  
Emission Spectroscopy ◽  
Near Infrared ◽  
Infrared Emission ◽  
Spectral Information ◽  
Fast Method ◽  
Infrared Emission Spectroscopy ◽  
Near Infrared Emission

A new, fast and reagent-free method for determination of the surface area of zeolite-based catalysts and zeolites using direct spectral information from near infrared emission spectroscopy and chemometrics is described.

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