Fabrication of surface acoustic wave devices by using x-ray lithography

Nobuyuki Yoshioka

doi:10.1116/1.584483

Fabrication of surface acoustic wave devices by using x-ray lithography

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.584483 ◽

1989 ◽

Vol 7 (6) ◽

pp. 1688 ◽

Cited By ~ 10

Author(s):

Nobuyuki Yoshioka

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

X Ray ◽

Acoustic Wave Devices

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Visualization of acoustic fields in surface acoustic wave devices by means of X-ray topography

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(94)00733-0 ◽

1995 ◽

Vol 97 (1-4) ◽

pp. 346-350 ◽

Cited By ~ 9

Author(s):

E. Zolotoyabko ◽

E. Jacobsohn ◽

H. Bartunik ◽

I. Polikarpov ◽

I. Koelln ◽

...

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Acoustic Fields ◽

X Ray ◽

Acoustic Wave Devices

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Stroboscopic X-Ray Topography of Surface Acoustic Wave Devices

10.1109/ultsym.1982.197847 ◽

1982 ◽

Cited By ~ 1

Author(s):

R.W. Whatmore ◽

P.A. Goddard ◽

B.K. Tanner

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

X Ray ◽

Acoustic Wave Devices

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The Temperature Coefficients of Frequency of Surface Acoustic Wave Devices with SiOxNy Passivation Films on LiTaO3 Substrates

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2020.3048030 ◽

2020 ◽

pp. 1-1

Author(s):

Atsushi Nishimura ◽

Satoru Matsuda ◽

Yoshiro Kabe

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Temperature Coefficients ◽

Acoustic Wave Devices

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High-Performance Surface Acoustic Wave Devices Using LiNbO₃/SiO₂/SiC Multilayered Substrates

IEEE Transactions on Microwave Theory and Techniques ◽

10.1109/tmtt.2021.3077261 ◽

2021 ◽

pp. 1-1

Author(s):

Junyao Shen ◽

Sulei Fu ◽

Rongxuan Su ◽

Huiping Xu ◽

Zengtian Lu ◽

...

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

High Performance ◽

Acoustic Wave Devices ◽

Performance Surface

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Method of frequency trimming surface acoustic wave devices

The Journal of the Acoustical Society of America ◽

10.1121/1.392694 ◽

1985 ◽

Vol 78 (5) ◽

pp. 1932-1932

Author(s):

Elio Mariani ◽

Arthur Ballato

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Acoustic Wave Devices ◽

Frequency Trimming

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Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

Analytical Methods ◽

10.1039/c7ay00690j ◽

2017 ◽

Vol 9 (28) ◽

pp. 4112-4134 ◽

Cited By ~ 56

Author(s):

David B. Go ◽

Massood Z. Atashbar ◽

Zeinab Ramshani ◽

Hsueh-Chia Chang

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Chemical Sensing ◽

Chemical Detection ◽

Microfluidic Platforms ◽

Acoustic Wave Sensors ◽

Acoustic Wave Devices ◽

Wave Sensors

Surface acoustic wave sensors and microfluidic platforms enable effective chemical detection and sample manipulation.

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Bias Stable Zinc Oxide-On-Silicon Surface Acoustic Wave Devices

10.1109/ultsym.1981.197728 ◽

1981 ◽

Cited By ~ 4

Author(s):

R.D. Cherne ◽

M.R. Melloch ◽

R.L. Cunshor ◽

R.F. Pierret

Keyword(s):

Zinc Oxide ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Silicon Surface ◽

Acoustic Wave Devices

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SiO2film overlays for temperature−stable surface acoustic wave devices

Applied Physics Letters ◽

10.1063/1.88076 ◽

1975 ◽

Vol 26 (3) ◽

pp. 75-77 ◽

Cited By ~ 36

Author(s):

T. E. Parker ◽

M. B. Schulz

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Stable Surface ◽

Acoustic Wave Devices

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Rigorous electrostatic field analysis of surface acoustic wave devices with closed-form formulae: A two-dimensional representation

[1991 Proceedings] 6th Mediterranean Electrotechnical Conference ◽

10.1109/melcon.1991.161802 ◽

2002 ◽

Author(s):

H.P. Reichinger ◽

A.R. Baghai-Wadji

Keyword(s):

Acoustic Wave ◽

Closed Form ◽

Surface Acoustic Wave ◽

Electrostatic Field ◽

Field Analysis ◽

Two Dimensional ◽

Dimensional Representation ◽

Acoustic Wave Devices

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Nano-meter electrode fabrication technology using electro-chemical effects and applications to 15 GHz-range surface acoustic wave devices

1994 IEEE MTT-S International Microwave Symposium Digest (Cat. No.94CH3389-4) ◽

10.1109/mwsym.1994.335566 ◽

2002 ◽

Author(s):

K. Yamanouchi ◽

T. Meguro ◽

Y. Wagatsuma ◽

H. Odagawa ◽

K. Yamamoto

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Fabrication Technology ◽

Chemical Effects ◽

Electrode Fabrication ◽

Acoustic Wave Devices

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