Global and stochastic space-charge effects in ion beam lithography
1995 ◽
Vol 13
(6)
◽
pp. 2409
◽
Keyword(s):
Ion Beam
◽
1994 ◽
Vol 12
(6)
◽
pp. 3533
◽
2008 ◽
Vol 99
(1)
◽
pp. 24-25
◽
Keyword(s):
2017 ◽
Vol 20
(12)
◽
2017 ◽
Vol 20
(8)
◽