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1999 ◽  
Vol 17 (6) ◽  
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Eiichi Nomura ◽  
Shoko Manako ◽  
Hideo Kobinata ◽  
Ken Nakajima ◽  
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Proximity Effect ◽  
Stencil Mask ◽  
Proximity Effect Correction

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Ken Nakajima ◽  
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Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Large Field ◽  
Stencil Mask ◽  
Proximity Effect Correction

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Yasuyuki Miyamoto ◽  
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Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Proximity effect correction for reticle fabrication

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Takayuki Iwamatsu ◽  
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Proximity Effect ◽  
Proximity Effect Correction

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2021 ◽  
Author(s):  
Xuetong Sun ◽  
Yang Zhang ◽  
Po-Chun Huang ◽  
Niloy Acharjee ◽  
Mario Dagenais ◽  
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Keyword(s):  
Proximity Effect ◽  
Phased Arrays ◽  
Proximity Effect Correction
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