Shape and dose control for proximity effect correction on massively parallel electron-beam systems
2020 ◽
Vol 38
(6)
◽
pp. 062603
Keyword(s):
2017 ◽
Vol 35
(5)
◽
pp. 051603
◽
1997 ◽
Vol 36
(Part 1, No. 12B)
◽
pp. 7546-7551
◽
Three-Dimensional Proximity Effect Correction for Multilayer Structures in Electron Beam Lithography
2004 ◽
Vol 43
(6B)
◽
pp. 3762-3766
◽
1993 ◽
Vol 11
(5)
◽
pp. 1906
2003 ◽
Vol 42
(Part 1, No. 6B)
◽
pp. 3827-3832
◽
Keyword(s):