Direct-simulation Monte Carlo modeling of reactor-scale gas-dynamic phenomena in a multiwafer atomic-layer deposition batch reactor

2021 ◽  
Vol 39 (5) ◽  
pp. 052404
Author(s):  
Sudharshanaraj Thiruppathiraj ◽  
Seung-Min Ryu ◽  
Jiho Uh ◽  
Laxminarayan L. Raja
Keyword(s):  
Monte Carlo ◽  
Batch Reactor ◽  
Direct Simulation Monte Carlo ◽  
Atomic Layer ◽  
Direct Simulation ◽  
Monte Carlo Modeling ◽  
Gas Dynamic ◽  
Layer Deposition ◽  
Simulation Monte Carlo ◽  
Dynamic Phenomena

Direct Simulation Monte Carlo Modeling of Homogenous Condensation in Supersonic Plumes

AIAA Journal ◽  
2005 ◽  
Vol 43 (8) ◽  
pp. 1784-1796 ◽  
Author(s):  
Jiaqiang Zhong ◽  
Michael I. Zeifman ◽  
Deborah A. Levin ◽  
Sergey F. Gimelshein
Keyword(s):  
Monte Carlo ◽  
Direct Simulation Monte Carlo ◽  
Direct Simulation ◽  
Monte Carlo Modeling ◽  
Simulation Monte Carlo
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