Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels
2012 ◽
Vol 21
(3)
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pp. 033028-1
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2015 ◽
Vol 74
(20)
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pp. 1793-1801
2013 ◽
Vol 32
(12)
◽
pp. 3357-3360
2001 ◽
Vol 10
(4)
◽
pp. 573-583
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