Low-power, low-pressure reactive-ion etching process for silicon etching with vertical and smooth walls for mechanobiology application
2017 ◽
Vol 16
(3)
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pp. 034501
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Keyword(s):
2010 ◽
Vol 38
(6)
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pp. 1512-1516
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Keyword(s):
2006 ◽
Vol 16
(12)
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pp. 2570-2575
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Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1996 ◽
Vol 5
(6-8)
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pp. 840-844
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2013 ◽
Vol 52
(10S)
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pp. 10MC04
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Keyword(s):
2006 ◽
Vol 45
(10B)
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pp. 8364-8369
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2016 ◽
Vol 229
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pp. 635-645
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