Surface roughness plays an important role on optical performances for optics in high-energy laser systems. In this study, optical surface of fused silica were polished by the Magnetorheological Finishing (MRF) processes. The polishing factors in term of Magnetorheological fluid (MR fluid) flow rate, polishing wheel rotational speed, electromagnet current, and polishing ribbon penetration depth, were carried out using an self-developed MRF machine to determine optimum conditions for surface roughness. The settings of the MRF processing parameters were determined by using Taguchi’s experimental design method. Taguchi’s orthogonal array, signal-to-noise (S/N) ratio and analysis of variance (ANOVA) were employed to investigate the optimal processing parameters. The experimental results indicate that surface with smaller roughness could be machined under the conditions with slower rotating speed and higher flow rate and current, and nearly independent of penetration depth.
Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing