Improvement of laser dicing performance II: dicing rate enhancement by multi beams and simultaneous aberration correction with phase-only spatial light modulator

2013 ◽  
Author(s):  
Yu Takiguchi ◽  
Naoya Matsumoto ◽  
Masaki Oyaizu ◽  
Jyunji Okuma ◽  
Makoto Nakano ◽  
...  
Keyword(s):  
Spatial Light Modulator ◽  
Aberration Correction ◽  
Light Modulator ◽  
Rate Enhancement

scholarly journals Dynamic aberration correction via spatial light modulator (SLM) for femtosecond direct laser writing: towards spherical voxels

2020 ◽  
Vol 28 (19) ◽  
pp. 27850
Author(s):  
Gabrielius Kontenis ◽  
Darius Gailevičius ◽  
Linas Jonušauskas ◽  
Vytautas Purlys
Keyword(s):  
Spatial Light Modulator ◽  
Aberration Correction ◽  
Direct Laser Writing ◽  
Light Modulator ◽  
Laser Writing ◽  
Direct Laser

Effect of Resident Stress on the Aberration Correction Ability of MEMS Spatial Light Modulator

2011 ◽  
Vol 317-319 ◽  
pp. 1677-1680
Author(s):  
Fang Rong Hu ◽  
Yi Xian Qian ◽  
Jun Hao Niu ◽  
Li Juan Zhang ◽  
Kun Nie
Keyword(s):  
Tensile Stress ◽  
Simulation Model ◽  
Spatial Light Modulator ◽  
Optical Simulation ◽  
Curvature Radius ◽  
Aberration Correction ◽  
Strehl Ratio ◽  
Light Modulator ◽  
Surface Flatness ◽  
Resident Stress

In this paper, the effect of resident stress on surface flatness and aberration correction ability of spatial light modulator (SLM) is studied. An optical simulation model based on ZEMAX software is presented to calculate the Strehl ratio of SLM. The result shows that the decrease of curvature radius can result in the decrease of Strehl ratio and aberration correction ability. Moreover, resident tensile stress and resident compressive stress have the same effect on the change of Strehl ratio.

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