scholarly journals Healing LER using directed self assembly: treatment of EUVL resists with aqueous solutions of block copolymers

Author(s):  
Ya-Mi Chuang ◽  
Han-Hao Cheng ◽  
Kevin Jack ◽  
Andrew Whittaker ◽  
Idriss Blakey
2019 ◽  
Vol 77 (11) ◽  
pp. 5783-5810 ◽  
Author(s):  
Mehul Khimani ◽  
Hiren Patel ◽  
Vijay Patel ◽  
Paresh Parekh ◽  
Rohit L. Vekariya

2020 ◽  
Vol 11 (8) ◽  
pp. 1514-1524 ◽  
Author(s):  
Rintaro Takahashi ◽  
Shotaro Miwa ◽  
Fabian H. Sobotta ◽  
Ji Ha Lee ◽  
Shota Fujii ◽  
...  

Upon extending a hydrophobic polymer chain from the end of a preceding hydrophilic chain in aqueous solutions, the resultant block copolymers may eventually undergo self-assembly.


2002 ◽  
Vol 724 ◽  
Author(s):  
Elizabeth R. Wright ◽  
R. Andrew McMillan ◽  
Alan Cooper ◽  
Robert P. Apkarian ◽  
Vincent P. Conticello

AbstractTriblock copolymers have traditionally been synthesized with conventional organic components. However, triblock copolymers could be synthesized by the incorporation of two incompatible protein-based polymers. The polypeptides would differ in their hydrophobicity and confer unique physiochemical properties to the resultant materials. One protein-based polymer, based on a sequence of native elastin, that has been utilized in the synthesis of biomaterials is poly (Valine-Proline-Glycine-ValineGlycine) or poly(VPGVG) [1]. This polypeptide has been shown to have an inverse temperature transition that can be adjusted by non-conservative amino acid substitutions in the fourth position [2]. By combining polypeptide blocks with different inverse temperature transition values due to hydrophobicity differences, we expect to produce amphiphilic polypeptides capable of self-assembly into hydrogels. Our research examines the design, synthesis and characterization of elastin-mimetic block copolymers as functional biomaterials. The methods that are used for the characterization include variable temperature 1D and 2D High-Resolution-NMR, cryo-High Resolutions Scanning Electron Microscopy and Differential Scanning Calorimetry.


Author(s):  
Weihua Li ◽  
Xueying Gu

Since tremendous progress has been made, directed self-assembly (DSA) of block copolymers has been regarded as one of the most promising bottom-up lithography techniques. In particular, DSA has been successfully...


Soft Matter ◽  
2021 ◽  
Author(s):  
Marzieh Najafi ◽  
Mehdi Habibi ◽  
Remco Fokkink ◽  
Wim Hennink ◽  
Tina Vermonden

In this study, temperature dependent behavior of dense dispersions of core crosslinked flower-like micelles is investigated. Micelles were prepared by mixing aqueous solutions of two ABA block copolymers with PEG...


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