Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection
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2011 ◽
Vol 131
(4)
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pp. 141-147
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1993 ◽
Vol 115
(2)
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pp. 814-816
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2003 ◽
Vol 20
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pp. 338-341
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2015 ◽
Vol 2015.8
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pp. _1511-1_-_1511-4_
2004 ◽
Vol 36
(8)
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pp. 651-656
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