Fundamental study on dissolution behavior of poly(methyl methacrylate) by quartz crystal microbalance

Mapping Intimacies ◽

10.1117/12.2218965 ◽

2016 ◽

Author(s):

Akihiro Konda ◽

Hiroki Yamamoto ◽

Shusuke Yoshitake ◽

Takahiro Kozawa

Keyword(s):

Methyl Methacrylate ◽

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior ◽

Fundamental Study ◽

Poly Methyl Methacrylate

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Study of the Anomalous Sorption Behavior of CO2 into Poly(methyl methacrylate) Films in the Vicinity of the Critical Pressure and Temperature Using a Quartz Crystal Microbalance (QCM)

Langmuir ◽

10.1021/la402982b ◽

2013 ◽

Vol 29 (46) ◽

pp. 14089-14100 ◽

Author(s):

Xue-Kun Li ◽

Gui-Ping Cao ◽

Li-Hua Chen ◽

Ren-Han Zhang ◽

Hong-Lai Liu ◽

...

Keyword(s):

Methyl Methacrylate ◽

Quartz Crystal Microbalance ◽

Critical Pressure ◽

Quartz Crystal ◽

Sorption Behavior ◽

Poly Methyl Methacrylate

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Using Plasticizers to Control the Hydrocarbon Selectivity of a Poly(Methyl Methacrylate)-Coated Quartz Crystal Microbalance Sensor

Analytical Chemistry ◽

10.1021/ac301458e ◽

2012 ◽

Vol 84 (20) ◽

pp. 8564-8570 ◽

Author(s):

Bobby Pejcic ◽

Emma Crooke ◽

Leigh Boyd ◽

Cara M. Doherty ◽

Anita J. Hill ◽

...

Keyword(s):

Methyl Methacrylate ◽

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Poly Methyl Methacrylate ◽

Quartz Crystal Microbalance Sensor

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Dissolution behavior of resist polymers studied by Quartz-Crystal-Microbalance method II

10.1117/12.711926 ◽

2007 ◽

Author(s):

Minoru Toriumi ◽

Fumihiko Okabe ◽

Masahiko Kitayama

Keyword(s):

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior

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Dissolution behavior of negative-type photoresists for display manufacture studied by quartz crystal microbalance method

Japanese Journal of Applied Physics ◽

10.7567/jjap.57.046501 ◽

2018 ◽

Vol 57 (4) ◽

pp. 046501 ◽

Author(s):

Asuka Tsuneishi ◽

Sachiyo Uchiyama ◽

Takahiro Kozawa

Keyword(s):

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior ◽

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Swelling and dissolution behavior of poly(methyl methacrylate) films in methyl ethyl ketone/methyl alcohol mixtures studied by optical techniques

Journal of Applied Polymer Science ◽

10.1002/app.10258 ◽

2002 ◽

Vol 83 (13) ◽

pp. 2823-2834 ◽

Author(s):

D. F. Stamatialis ◽

M. Sanopoulou ◽

I. Raptis

Keyword(s):

Methyl Methacrylate ◽

Methyl Ethyl Ketone ◽

Methyl Alcohol ◽

Dissolution Behavior ◽

Methyl Ethyl ◽

Optical Techniques ◽

Poly Methyl Methacrylate ◽

Alcohol Mixtures

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Effects of low-molecular weight resist components on dissolution behavior of chemically amplified resists for extreme ultraviolet lithography studied by quartz crystal microbalance

10.1117/12.2085482 ◽

2015 ◽

Author(s):

Masaki Mitsuyasu ◽

Hiroki Yamamoto ◽

Takahiro Kozawa

Keyword(s):

Molecular Weight ◽

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Extreme Ultraviolet ◽

Dissolution Behavior ◽

Low Molecular Weight ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Chemically Amplified ◽

Chemically Amplified Resists

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Sorption of Benzene, Dichloromethane, and n-Propyl Acetate by Poly(methyl methacrylate)/ Polystyrene Copolymers at 323.15 K Using a Quartz Crystal Balance

Journal of Chemical & Engineering Data ◽

10.1021/acs.jced.8b00094 ◽

2018 ◽

Vol 63 (8) ◽

pp. 2753-2757 ◽

Author(s):

Howard C. Wong ◽

Scott W. Campbell ◽

Venkat R. Bhethanabotla

Keyword(s):

Methyl Methacrylate ◽

Quartz Crystal ◽

Propyl Acetate ◽

Poly Methyl Methacrylate

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Study on dissolution behavior of polymer-bound and polymer-blended photo acid generator (PAG) resists by using quartz crystal microbalance (QCM) method

Microelectronic Engineering ◽

10.1016/j.mee.2014.07.019 ◽

2014 ◽

Vol 129 ◽

pp. 65-69 ◽

Author(s):

Hiroki Yamamoto ◽

Takahiro Kozawa ◽

Seiichi Tagawa

Keyword(s):

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior ◽

Photo Acid Generator

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Properties of positive resists. III. The dissolution behavior of poly(methyl methacrylate-co-maleic anhydride)

Journal of Applied Polymer Science ◽

10.1002/app.1990.070391107 ◽

1990 ◽

Vol 39 (1112) ◽

pp. 2267-2277 ◽

Author(s):

Rashmi K. Drummond ◽

Gail L. Boydston ◽

Nikolaos A. Peppas

Keyword(s):

Maleic Anhydride ◽

Methyl Methacrylate ◽

Dissolution Behavior ◽

Poly Methyl Methacrylate

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A fundamental study of adsorption kinetics of surfactants onto metal oxides using quartz crystal microbalance with dissipation (QCM-D)

Colloids and Surfaces A Physicochemical and Engineering Aspects ◽

10.1016/j.colsurfa.2019.124237 ◽

2020 ◽

Vol 586 ◽

pp. 124237 ◽

Author(s):

Sandra C. Medina ◽

Andreia S.F. Farinha ◽

Abdul-Hamid Emwas ◽

Assiyeh Tabatabai ◽

TorOve Leiknes

Keyword(s):

Metal Oxides ◽

Quartz Crystal Microbalance ◽

Adsorption Kinetics ◽

Quartz Crystal ◽

Fundamental Study ◽

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