Dissolution behavior of negative-type photoresists for display manufacture studied by quartz crystal microbalance method

2018 ◽  
Vol 57 (4) ◽  
pp. 046501 ◽  
Author(s):  
Asuka Tsuneishi ◽  
Sachiyo Uchiyama ◽  
Takahiro Kozawa
2019 ◽  
Vol 25 (6) ◽  
pp. 879-884
Author(s):  
Takahiro Sakai ◽  
Hayato Seki ◽  
Shogo Yoshida ◽  
Hayato Hori ◽  
Hisashi Suzuki ◽  
...  

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