Assessment of local variability by high-throughput e-beam metrology for prediction of patterning defect probabilities

Author(s):  
Stefan Hunsche ◽  
Roy Anunciado ◽  
Fuming Wang ◽  
Antonio Corradi ◽  
Junwei Wei ◽  
...  
2007 ◽  
Vol 177 (4S) ◽  
pp. 52-53
Author(s):  
Stefano Ongarello ◽  
Eberhard Steiner ◽  
Regina Achleitner ◽  
Isabel Feuerstein ◽  
Birgit Stenzel ◽  
...  

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