Glancing angle ion beam sputtering of optical thin films

Advances in Optical Thin Films VI ◽

10.1117/12.2307477 ◽

2018 ◽

Author(s):

Mathias Mende ◽

Wolfgang Ebert

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Glancing Angle ◽

Beam Sputtering

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Preparation of thin films of (Tb,Dy)Fe2 giant magnetostrictive alloy by ion beam sputtering process.

Journal of Advanced Science ◽

10.2978/jsas.8.27 ◽

1996 ◽

Vol 8 (1/2) ◽

pp. 27-28

Author(s):

Mitsuhiro WADA ◽

Yoshihito MATSUMURA ◽

Hirohisa UCHIDA ◽

Haru-Hisa UCHIDA ◽

Hideo KANEKO

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering

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EFFECT OF DEPOSITION CONDITION ON THE FERROELECTRIC PROPERTIES OF BARIUM SODIUM NIOBATE THIN FILMS DEPOSITED BY ION BEAM SPUTTERING

Integrated Ferroelectrics ◽

10.1080/10584580600657484 ◽

2006 ◽

Vol 80 (1) ◽

pp. 163-172

Author(s):

JUNHUI LOU ◽

HEE YOUNG LEE ◽

JEONG-JOO KIM ◽

SANG-HEE CHO

Keyword(s):

Ion Beam ◽

Ferroelectric Properties ◽

Deposition Condition ◽

Sodium Niobate ◽

Ion Beam Sputtering ◽

Beam Sputtering

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Effects of oxygen partial pressure on the crystallographic structure of Mn-Zn ferrite thin films deposited by ion beam sputtering

Surface and Coatings Technology ◽

10.1016/0257-8972(94)90174-0 ◽

1994 ◽

Vol 68-69 ◽

pp. 279-284 ◽

Author(s):

Hae Seok Cho ◽

Sang Ki Ha ◽

Hyeong Joon Kim

Keyword(s):

Oxygen Partial Pressure ◽

Partial Pressure ◽

Ion Beam ◽

Crystallographic Structure ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Ferrite Thin Films

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Fabrication of the Ln-Ba-Cu-O thin films by ion beam sputtering.

Shinku ◽

10.3131/jvsj.32.259 ◽

1989 ◽

Vol 32 (3) ◽

pp. 259-262

Author(s):

Tetsuro TAJIMA ◽

Hajime KUWAHARA ◽

Kohei OTANI ◽

Tsutom YOTSUYA ◽

Yoshihiko SUZUKI ◽

...

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering

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Effect of thin films prepared by reactive ion beam sputtering on vacuum breakdown voltage.

Shinku ◽

10.3131/jvsj.33.346 ◽

1990 ◽

Vol 33 (3) ◽

pp. 346-348

Author(s):

Shinichi KOBAYASHI ◽

Da Xiang SUN

Keyword(s):

Breakdown Voltage ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Vacuum Breakdown ◽

Beam Sputtering

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Growth of Thin Films by UHV ION Beam Sputtering Deposition Technique

Erosion and Growth of Solids Stimulated by Atom and Ion Beams ◽

10.1007/978-94-009-4422-0_30 ◽

1986 ◽

pp. 457-460 ◽

Author(s):

C. Pellet ◽

C. Schwebel ◽

F. Meyer ◽

G. Gautherin

Keyword(s):

Ion Beam ◽

Deposition Technique ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering

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Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering

Journal of Applied Physics ◽

10.1063/1.2197287 ◽

2006 ◽

Vol 99 (11) ◽

pp. 113519 ◽

Author(s):

G. Abadias ◽

Y. Y. Tse ◽

Ph. Guérin ◽

V. Pelosin

Keyword(s):

Surface Morphology ◽

Ion Beam ◽

Preferred Orientation ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Tin Thin Films ◽

Dual Ion Beam Sputtering

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Epitaxial growth of MgO thin films on silicon by dual ion beam sputtering

Thin Solid Films ◽

10.1016/0040-6090(93)90720-a ◽

1993 ◽

Vol 223 (1) ◽

pp. 11-13 ◽

Author(s):

Yijie Li ◽

Guangcheng Xiong ◽

Guijun Lian ◽

Jie Li ◽

Zizhao Gan

Keyword(s):

Epitaxial Growth ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Nanomechanical Properties of Amorphous and Polycrystalline SrTiO3 Transparent Thin Films Prepared by Ion Beam Sputtering

Journal of Materials Engineering and Performance ◽

10.1007/s11665-012-0320-2 ◽

2012 ◽

Vol 22 (3) ◽

pp. 863-868 ◽

Author(s):

Gasidit Panomsuwan ◽

Osamu Takai ◽

Nagahiro Saito

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Nanomechanical Properties ◽

Beam Sputtering

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Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.08.051 ◽

2008 ◽

Vol 516 (11) ◽

pp. 3582-3585 ◽

Author(s):

S.G. Yoon ◽

S.M. Kang ◽

W.S. Jung ◽

S.-W. Kim ◽

D.H. Yoon

Keyword(s):

Optical Properties ◽

Ion Beam ◽

Intrinsic Stress ◽

Ion Beam Sputtering ◽

Beam Voltage ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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