A combination process of magnetorheological finishing and computer controlled optical surfacing on single-crystal silicon surface

2019 ◽  
Author(s):  
Chi Luo ◽  
Feng Shi ◽  
Yaoyu Zhong ◽  
Ye Tian
Keyword(s):  
Single Crystal ◽  
Silicon Surface ◽  
Single Crystal Silicon ◽  
Magnetorheological Finishing ◽  
Crystal Silicon ◽  
Combination Process ◽  
Computer Controlled Optical Surfacing ◽  
Computer Controlled

Formation of ultrathin iron silicide layers on the single-crystal silicon surface

2006 ◽  
Vol 48 (10) ◽  
pp. 2016-2020 ◽  
Author(s):  
M. V. Gomoyunova ◽  
D. E. Malygin ◽  
I. I. Pronin
Keyword(s):  
Single Crystal ◽  
Silicon Surface ◽  
Iron Silicide ◽  
Single Crystal Silicon ◽  
Crystal Silicon
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