Single crystal silicon: surface evolution regularity of chemical etching and effect of nano jet polishing on damage precursor

2019 ◽  
Author(s):  
Wanli Zhang ◽  
Feng Shi ◽  
Yifan Dai ◽  
Ci Song ◽  
Ye Tian ◽  
...  
Keyword(s):  
Single Crystal ◽  
Chemical Etching ◽  
Silicon Surface ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Surface Evolution ◽  
Damage Precursor

Formation of ultrathin iron silicide layers on the single-crystal silicon surface

2006 ◽  
Vol 48 (10) ◽  
pp. 2016-2020 ◽  
Author(s):  
M. V. Gomoyunova ◽  
D. E. Malygin ◽  
I. I. Pronin
Keyword(s):  
Single Crystal ◽  
Silicon Surface ◽  
Iron Silicide ◽  
Single Crystal Silicon ◽  
Crystal Silicon
Sign in / Sign up

Export Citation Format

Share Document