Smart ultra short pulse laser processing with rotating beam: laser micro drilling, cutting, and turning

Author(s):  
Florian Lendner
Author(s):  
Martin Priwisch ◽  
Sebastian Dormann ◽  
Daniel Zontar ◽  
Clemens Hönninger ◽  
Lars Penning ◽  
...  

2002 ◽  
Vol 78 (12) ◽  
pp. 1280-1281
Author(s):  
Yoshiaki KONDOH ◽  
Takashi YABE ◽  
Jun MAEHARA ◽  
Youichi OGATA ◽  
Takashi NAKAMURA

Author(s):  
Christian Freitag ◽  
Margit Wiedenmann ◽  
Jan-Philipp Negel ◽  
André Loescher ◽  
Volkher Onuseit ◽  
...  

2012 ◽  
Vol 112 (1) ◽  
pp. 191-196 ◽  
Author(s):  
Yoshiki Nakata ◽  
Keiichi Murakawa ◽  
Kenji Sonoda ◽  
Kazuma Momoo ◽  
Noriaki Miyanaga ◽  
...  

Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.


Sign in / Sign up

Export Citation Format

Share Document