Progress in EUV resist screening by interference lithography for high-NA lithography

2021 ◽  
Author(s):  
Timothée P. Allenet ◽  
Michaela Vockenhuber ◽  
Chia-Kai Yeh ◽  
Jara Garcia Santaclara ◽  
Lidia van Lent-Protasova ◽  
...  
Keyword(s):  
Interference Lithography

2D periodic structures patterned on 3D surfaces by interference lithography for SERS

2018 ◽  
Vol 461 ◽  
pp. 171-174 ◽  
Author(s):  
Ivana Lettrichova ◽  
Agata Laurencikova ◽  
Dusan Pudis ◽  
Jozef Novak ◽  
Matej Goraus ◽  
...  
Keyword(s):  
Periodic Structures ◽  
Interference Lithography ◽  
3D Surfaces

scholarly journals Optimal polarization modulation for orthogonal two-axis Lloyd’s mirror interference lithography

2017 ◽  
Vol 25 (19) ◽  
pp. 22237 ◽  
Author(s):  
Xiuguo Chen ◽  
Zongwei Ren ◽  
Yuki Shimizu ◽  
Yuan-liu Chen ◽  
Wei Gao
Keyword(s):  
Interference Lithography ◽  
Polarization Modulation

scholarly journals Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography

2008 ◽  
Vol 92 (10) ◽  
pp. 102505 ◽  
Author(s):  
F. Luo ◽  
L. J. Heyderman ◽  
H. H. Solak ◽  
T. Thomson ◽  
M. E. Best
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Magnetic Island

Periodic patterning using multi-facet prism based laser interference lithography

Laser Physics ◽  
2009 ◽  
Vol 19 (3) ◽  
pp. 505-510 ◽  
Author(s):  
R. Sidharthan ◽  
F. Chollet ◽  
V. M. Murukeshan
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference

Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography

2017 ◽  
Vol 170 ◽  
pp. 49-53 ◽  
Author(s):  
Jun Zhao ◽  
Yanqing Wu ◽  
Chaofan Xue ◽  
Shumin Yang ◽  
Liansheng Wang ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Periodic Structures ◽  
Interference Lithography ◽  
X Ray

Fabrication of Thiol–Ene “Clickable” Copolymer-Brush Nanostructures on Polymeric Substrates via Extreme Ultraviolet Interference Lithography

2015 ◽  
Vol 7 (21) ◽  
pp. 11337-11345 ◽  
Author(s):  
Matthias Dübner ◽  
Tugce N. Gevrek ◽  
Amitav Sanyal ◽  
Nicholas D. Spencer ◽  
Celestino Padeste
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Polymeric Substrates ◽  
Copolymer Brush

scholarly journals Band gap of hexagonal 2D photonic crystals with elliptical holes recorded by interference lithography

2006 ◽  
Vol 14 (11) ◽  
pp. 4873 ◽  
Author(s):  
F. Quiñónez ◽  
J. W. Menezes ◽  
L. Cescato ◽  
V. F. Rodriguez-Esquerre ◽  
H. Hernandez-Figueroa ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Band Gap ◽  
Interference Lithography ◽  
Elliptical Holes

Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations

2021 ◽  
pp. 2150459
Author(s):  
Xiangxian Wang ◽  
Tianxu Jia ◽  
Jiankai Zhu ◽  
Yingwen Su ◽  
Liping Zhang ◽  
...  
Keyword(s):  
Manufacturing Industry ◽  
Structural Parameters ◽  
Interference Lithography ◽  
Polarization Angle ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Micro Structure ◽  
Periodic Patterns ◽  
Beam Laser ◽  
Micro Structures

In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.

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