scholarly journals Potential of dry etching for the fabrication of fused silica micro-optical elements

1999 ◽  
Author(s):  
Philippe Nussbaum ◽  
Kenneth J. Weible ◽  
Markus Rossi ◽  
Hans Peter Herzig
Keyword(s):  
Dry Etching ◽  
Fused Silica ◽  
Optical Elements

Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements

2005 ◽  
Vol 291-292 ◽  
pp. 365-370 ◽  
Author(s):  
Wei Min Lin ◽  
Hitoshi Ohmori ◽  
T. Suzuki ◽  
Yoshihiro Uehara ◽  
Shinya MORITA
Keyword(s):  
Ground Surface ◽  
Diamond Wheel ◽  
Fused Silica ◽  
Optical Elements ◽  
Form Accuracy ◽  
High Form ◽  
Ultra Precision ◽  
Fundamental Research ◽  
Aspherical Mirrors ◽  
Polishing Tool

This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As the result, final surface roughness of 1.4nmRa and form accuracy of 1.2 μm was obtained.

Resist shaping for replication of micro-optical elements with continuous relief in fused silica

2010 ◽  
Vol 35 (8) ◽  
pp. 1169 ◽  
Author(s):  
Peng Jin ◽  
Yulong Gao ◽  
Tingting Liu ◽  
Xiaojun Li ◽  
Jiubin Tan
Keyword(s):  
Fused Silica ◽  
Optical Elements

Time-resolved transmission study of fused silica during laser-induced backside dry etching

2009 ◽  
Vol 255 (10) ◽  
pp. 5405-5408
Author(s):  
T. Smausz ◽  
Z. Zalatnai ◽  
B. Papdi ◽  
T. Csákó ◽  
Zs. Bor ◽  
...  
Keyword(s):  
Dry Etching ◽  
Fused Silica ◽  
Time Resolved ◽  
Transmission Study

Effect of chemical modification technology laser damage threshold of fused silica optical elements

2016 ◽  
Vol 24 (12) ◽  
pp. 2956-2961
Author(s):  
袁志刚 YUAN Zhi-gang ◽  
李亚国 LI Ya-guo ◽  
陈贤华 CHEN Xian-hua ◽  
徐 曦 XU Xi ◽  
赵世杰 ZHAO Shi-jie ◽  
...  
Keyword(s):  
Chemical Modification ◽  
Damage Threshold ◽  
Fused Silica ◽  
Laser Damage Threshold ◽  
Laser Damage ◽  
Optical Elements
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