Dispersive white-light interferometry for thin-film thickness profile measurement

2005 ◽  
Author(s):  
Young-Sik Ghim ◽  
Seung-Woo Kim
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
White Light ◽  
Profile Measurement ◽  
White Light Interferometry ◽  
Thin Film Thickness ◽  
Thickness Profile

Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry

2008 ◽  
Vol 46 (2) ◽  
pp. 179-184 ◽  
Author(s):  
Young-Min Hwang ◽  
Sung-Won Yoon ◽  
Jung-Hwan Kim ◽  
Souk Kim ◽  
Heui-Jae Pahk
Keyword(s):  
Thin Film ◽  
Wavelet Transform ◽  
Film Thickness ◽  
Profile Measurement ◽  
Thin Film Thickness ◽  
Thickness Profile ◽  
Wavelength Scanning

Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer

2013 ◽  
Vol 24 (7) ◽  
pp. 075002 ◽  
Author(s):  
Young-Sik Ghim ◽  
Hyug-Gyo Rhee ◽  
Ho-Soon Yang ◽  
Yun-Woo Lee
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Profile Measurement ◽  
Thin Film Thickness ◽  
Low Coherence ◽  
Thickness Profile
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