Fast and Reliable Measurement of Thin Film Thickness Profile Based on Wavelet Transform in Spectrally Resolved White-Light Interferometry

2018 ◽  
Vol 19 (2) ◽  
pp. 213-219 ◽  
Author(s):  
Min-Gab Kim ◽  
Heui-Jae Pahk
Keyword(s):  
Thin Film ◽  
Wavelet Transform ◽  
Film Thickness ◽  
White Light ◽  
White Light Interferometry ◽  
Reliable Measurement ◽  
Thin Film Thickness ◽  
Thickness Profile ◽  
Spectrally Resolved

Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry

2008 ◽  
Vol 46 (2) ◽  
pp. 179-184 ◽  
Author(s):  
Young-Min Hwang ◽  
Sung-Won Yoon ◽  
Jung-Hwan Kim ◽  
Souk Kim ◽  
Heui-Jae Pahk
Keyword(s):  
Thin Film ◽  
Wavelet Transform ◽  
Film Thickness ◽  
Profile Measurement ◽  
Thin Film Thickness ◽  
Thickness Profile ◽  
Wavelength Scanning
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