Model-based proximity effect correction for electron-beam direct-write lithography
Keyword(s):
2015 ◽
Vol 33
(6)
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pp. 06FD02
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2009 ◽
Vol 27
(6)
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pp. 2569
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2013 ◽
Vol 31
(2)
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pp. 021605
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Keyword(s):
1992 ◽
Vol 10
(6)
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pp. 3099
Keyword(s):
2017 ◽
Vol 35
(5)
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pp. 051603
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2020 ◽
Vol 38
(6)
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pp. 062603
Keyword(s):
1997 ◽
Vol 36
(Part 1, No. 12B)
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pp. 7546-7551
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