Evolution of resist roughness during development: stochastic simulation and dynamic scaling analysis

2010 ◽  
Author(s):  
Vassilios Constantoudis ◽  
George P. Patsis ◽  
Evangelos Gogolides
Keyword(s):  
Stochastic Simulation ◽  
Dynamic Scaling ◽  
Scaling Analysis

SCALING APPROACH TO ANOMALOUS SURFACE ROUGHENING OF THE (d+1)-DIMENSIONAL MOLECULAR-BEAM EPITAXY GROWTH EQUATIONS

2006 ◽  
Vol 20 (30) ◽  
pp. 1935-1941 ◽  
Author(s):  
HUI XIA ◽  
GANG TANG ◽  
KUI HAN ◽  
DA-PENG HAO ◽  
HUA CHEN ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Molecular Beam Epitaxy Growth ◽  
Surface Roughening ◽  
Dynamic Scaling ◽  
Scaling Analysis ◽  
Local Fluctuations ◽  
Standard Family ◽  
Anomalous Surface ◽  
Growth Equations

To determine anomalous dynamic scaling of continuum growth equations, López12 proposed an analytical approach, which is based on the scaling analysis introduced by Hentschel and Family.15 In this work, we generalize this scaling analysis to the (d+1)-dimensional molecular-beam epitaxy equations to determine their anomalous dynamic scaling. The growth equations studied here include the linear molecular-beam epitaxy (LMBE) and Lai–Das Sarma–Villain (LDV). We find that both the LMBE and LDV equations, when the substrate dimension d>2, correspond to a standard Family–Vicsek scaling, however, when d<2, exhibit anomalous dynamic roughening of the local fluctuations of the growth height. When the growth equations exhibit anomalous dynamic scaling, we obtain the local roughness exponents by using scaling relation α loc =α-zκ, which are consistent with the corresponding numerical results.

scholarly journals Roughness development in electrodeposited soft magnetic CoNiFe films in the presence of organic additives

2003 ◽  
Vol 68 (4-5) ◽  
pp. 349-361 ◽  
Author(s):  
Ibro Tabakovic ◽  
Steve Riemer
Keyword(s):  
Dynamic Scaling ◽  
Scaling Analysis ◽  
Lauryl Sulfate ◽  
Organic Additives ◽  
Plating Bath ◽  
Force Microscopy ◽  
Kinetic Roughening ◽  
Polar Species ◽  
Atomic Force ◽  
Hydrogen Bubbles

The effects of three additives, sodium lauryl sulfate (NaLS), saccharin (Sacc), and NaLS + Sacc, on roughness development during the electrodeposition of CoNiFe films were investigated. The characterization of these films by atomic force microscopy shows that the electrodeposits produced from NaLS containing solution result in a rough surface. The role of NaLS surfactant is to change the interfacial tension and clean non-polar species like hydrogen bubbles from the surface. In Sacc containing solution the evolution of a smooth surface is controlled by adsorbed Sacc molecule at the interface. The kinetic roughening of these deposits was investigated by dynamic scaling analysis. It was demonstrated that the roughness of CoNiFe films, obtained in the presence of NaLS + Sacc additives, was also dependent on current density, roughness of substrate, and the temperature of plating bath.

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