scholarly journals Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

2021 ◽  
Vol 7 (5) ◽  
pp. eabd9667
Author(s):  
Michael Tanksalvala ◽  
Christina L. Porter ◽  
Yuka Esashi ◽  
Bin Wang ◽  
Nicholas W. Jenkins ◽  
...  

Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.

Author(s):  
Srinivasa Rao Konda ◽  
Venugopal Rao Soma ◽  
Murali Banavoth ◽  
Ravi Ketavath ◽  
Venkatesh Mottamchetty ◽  
...  

2021 ◽  
Vol 7 (21) ◽  
pp. eabe2265
Author(s):  
Tobias Helk ◽  
Emma Berger ◽  
Sasawat Jamnuch ◽  
Lars Hoffmann ◽  
Adeline Kabacinski ◽  
...  

The lack of available table-top extreme ultraviolet (XUV) sources with high enough fluxes and coherence properties has limited the availability of nonlinear XUV and x-ray spectroscopies to free-electron lasers (FELs). Here, we demonstrate second harmonic generation (SHG) on a table-top XUV source by observing SHG near the Ti M2,3 edge with a high-harmonic seeded soft x-ray laser. Furthermore, this experiment represents the first SHG experiment in the XUV. First-principles electronic structure calculations suggest the surface specificity and separate the observed signal into its resonant and nonresonant contributions. The realization of XUV-SHG on a table-top source opens up more accessible opportunities for the study of element-specific dynamics in multicomponent systems where surface, interfacial, and bulk-phase asymmetries play a driving role.


Author(s):  
R. Bartels ◽  
S. Backus ◽  
A. Paul ◽  
H. Kapteyn ◽  
M. Murnane

2018 ◽  
Vol 4 (10) ◽  
pp. eaau4295 ◽  
Author(s):  
Robert M. Karl ◽  
Giulia F. Mancini ◽  
Joshua L. Knobloch ◽  
Travis D. Frazer ◽  
Jorge N. Hernandez-Charpak ◽  
...  

Imaging charge, spin, and energy flow in materials is a current grand challenge that is relevant to a host of nanoenhanced systems, including thermoelectric, photovoltaic, electronic, and spin devices. Ultrafast coherent x-ray sources enable functional imaging on nanometer length and femtosecond timescales particularly when combined with advances in coherent imaging techniques. Here, we combine ptychographic coherent diffractive imaging with an extreme ultraviolet high harmonic light source to directly visualize the complex thermal and acoustic response of an individual nanoscale antenna after impulsive heating by a femtosecond laser. We directly image the deformations induced in both the nickel tapered nanoantenna and the silicon substrate and see the lowest-order generalized Lamb wave that is partially confined to a uniform nanoantenna. The resolution achieved—sub–100 nm transverse and 0.5-Å axial spatial resolution, combined with ≈10-fs temporal resolution—represents a significant advance in full-field dynamic imaging capabilities. The tapered nanoantenna is sufficiently complex that a full simulation of the dynamic response would require enormous computational power. We therefore use our data to benchmark approximate models and achieve excellent agreement between theory and experiment. In the future, this work will enable three-dimensional functional imaging of opaque materials and nanostructures that are sufficiently complex that their functional properties cannot be predicted.


2021 ◽  
Author(s):  
Stylianos Petrakis ◽  
Makis Bakarezos ◽  
Michael Tatarakis ◽  
Emmanouil Benis ◽  
Nektarios Papadogiannis

Abstract The quantum phases of the electron paths driven by an ultrafast laser in high harmonic generation in an atomic gas depends linearly on the instantaneous cycle-averaged laser intensity. Using high laser intensities, a complete single ionisation of the atomic gas may occur before the laser pulse peak. Therefore, high harmonic generation could be localized only in a temporal window at the leading edge of laser pulse envelope. Varying the laser frequency chirp of an intense ultrafast laser pulse, the centre, and the width of the temporal window, that the high harmonic generation phenomenon occurs, could be controlled with high accuracy. This way, both the duration and the phase of the electron trajectories, that generate efficiently high harmonics, is fully controlled. An accurate and robust method of spectral control and selection of the high harmonic extreme ultraviolet light from distinct quantum paths is experimentally demonstrated. Furthermore, a phenomenological numerical model enlightens the physical processes that take place. This novel approach of the electron quantum path selection via laser chirp is a simple and versatile way of controlling the time-spectral characteristics of the coherent extreme ultraviolet light with future applications in the fields of attosecond pulses and soft x-ray nano-imaging.


2016 ◽  
Vol 33 (9) ◽  
pp. 1986 ◽  
Author(s):  
Ming-Fu Lin ◽  
Max A. Verkamp ◽  
Elizabeth S. Ryland ◽  
Kaili Zhang ◽  
Josh Vura-Weis

Instruments ◽  
2019 ◽  
Vol 3 (3) ◽  
pp. 47 ◽  
Author(s):  
Vittoria Petrillo ◽  
Michele Opromolla ◽  
Alberto Bacci ◽  
Illya Drebot ◽  
Giacomo Ghiringhelli ◽  
...  

Fine time-resolved analysis of matter—i.e., spectroscopy and photon scattering—in the linear response regime requires fs-scale pulsed, high repetition rate, fully coherent X-ray sources. A seeded Free Electron Laser (FEL) driven by a Linac based on Super Conducting cavities, generating 10 8 – 10 10 coherent photons at 2–5 keV with 0.2–1 MHz of repetition rate, can address this need. Three different seeding schemes, reaching the X-ray range, are described hereafter. The first two are multi-stage cascades upshifting the radiation frequency by a factor of 10–30 starting from a seed represented by a coherent flash of extreme ultraviolet light. This radiation can be provided either by the High Harmonic Generation of an optical laser or by an FEL Oscillator operating at 12–14 nm. The third scheme is a regenerative amplifier working with X-ray mirrors. The whole chain of the X-ray generation is here described by means of start-to-end simulations.


2017 ◽  
Vol 7 (1) ◽  
Author(s):  
Alex Turpin ◽  
Laura Rego ◽  
Antonio Picón ◽  
Julio San Román ◽  
Carlos Hernández-García

2017 ◽  
Vol 25 (6) ◽  
pp. 6936 ◽  
Author(s):  
Martin Wünsche ◽  
Silvio Fuchs ◽  
Stefan Aull ◽  
Jan Nathanael ◽  
Max Möller ◽  
...  

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