Nature of large-scale oscillations in oxygen concentration along the growth axis in Czochralski-grown silicon crystals

2001 ◽  
Vol 46 (6) ◽  
pp. 1046-1048
Author(s):  
V. V. Litvinov ◽  
A. N. Petukh ◽  
Yu. M. Pokotilo
1995 ◽  
Vol 378 ◽  
Author(s):  
Koji Izunome ◽  
Xinming Huang ◽  
Shiniji Togawa ◽  
Kazutaka Terashima ◽  
Shigeyuki Kimura

AbstractIn Czochralski-grown (CZ) silicon single crystals, antimony (Sb) doping decreases the oxygen concentration by enhancing oxygen evaporation from the melt surface. In this study, Ar ambient pressures of around 100 Torr over the silicon melt were found to suppress evaporation of oxide species. To clarify the effect of the growth chamber ambient pressure on oxygen concentration, heavily Sb-doped CZ silicon crystals were grown under Ar pressures of 30, 60, and 100 Torr. Increasing Ar pressure increases the oxygen and Sb concentrations at the melt surface. The oxygen concentration under an Ar pressure of 100 Torr was 1.2 times higher that under 30 Torr when the solidified fractions are 0.5 or larger. The oxygen evaporation rate is controllable by gas phase transport of Sb2O at high Ar pressures.


Author(s):  
H. FÖll ◽  
D.G. Ast

In contrast to grain boundaries in metals, little is known about the structure and the properties of grain boundaries in covalent crystals, especially in semiconductors. The reason for this lack of knowledge is that grain-boundary-free crystals of, e.g., silicon, are easy to grow; commercially used silicon crystals are free of dislocations and thus nearly perfect. It was not until after the use of polycrystalline silicon had been proposed for the large scale production of cheap solar cells that grain-boundary properties in silicon gained considerable interest. In particular their electronic properties and their influence on device performance is important in this case. Moreover, “grain boundary devices”, i.e., devices with a grain boundary as the active element and with rather interesting properties, are conceivable - provided the relationship between the grain boundary structure and their electronic behaviour can be understood (cf. /l/). In addition, the study of grain boundaries in silicon, with an electronic structure and a binding configuration very different from metals, may provide a valuable tool to test competing grain boundary models (see, e.g., /2,3/) and may lead to a deeper insight into the crystal parameters governing the grain boundary properties.


Crystals ◽  
2018 ◽  
Vol 8 (6) ◽  
pp. 244 ◽  
Author(s):  
Tomoro Ide ◽  
Hirofumi Harada ◽  
Yoshiji Miyamura ◽  
Masato Imai ◽  
Satoshi Nakano ◽  
...  

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