In Situ Reflection Electron Microscopy for the Analysis of Silicon Surface Processes: Sublimation, Electromigration, and Adsorption of Impurity Atoms

2021 ◽  
Vol 66 (4) ◽  
pp. 570-580
Author(s):  
D. I. Rogilo ◽  
S. V. Sitnikov ◽  
E. E. Rodyakina ◽  
A. S. Petrov ◽  
S. A. Ponomarev ◽  
...  
2021 ◽  
Vol 1984 (1) ◽  
pp. 012016
Author(s):  
S A Ponomarev ◽  
D I Rogilo ◽  
N N Kurus ◽  
L S Basalaeva ◽  
K A Kokh ◽  
...  

Author(s):  
H.-J. Ou

The understanding of the interactions between the small metallic particles and ceramic surfaces has been studied by many catalyst scientists. We had developed Scanning Reflection Electron Microscopy technique to study surface structure of MgO hulk cleaved surface and the interaction with the small particle of metals. Resolutions of 10Å has shown the periodic array of surface atomic steps on MgO. The SREM observation of the interaction between the metallic particles and the surface may provide a new perspective on such processes.


Author(s):  
O.L. Krivanek ◽  
G.J. Wood

Electron microscopy at 0.2nm point-to-point resolution, 10-10 torr specimei region vacuum and facilities for in-situ specimen cleaning presents intere; ing possibilities for surface structure determination. Three methods for examining the surfaces are available: reflection (REM), transmission (TEM) and profile imaging. Profile imaging is particularly useful because it giv good resolution perpendicular as well as parallel to the surface, and can therefore be used to determine the relationship between the surface and the bulk structure.


1989 ◽  
Vol 113 (2) ◽  
pp. 421-430 ◽  
Author(s):  
A. V. Latyshev ◽  
A. L. Aseev ◽  
A. B. Krasilnikov ◽  
S. I. Stenin

Author(s):  
С.В. Ситников ◽  
Е.Е. Родякина ◽  
А.В. Латышев

AbstractBy means of in situ ultrahigh vacuum reflection electron microscopy, the nucleation of vacancy islands on wide terraces of the Si(100) surface is investigated. The temperature dependence of the displacement of a vacancy island nucleation center is determined in the process of heating a sample with a dc electric current. On the basis of a theoretical model, the effective electric charge of addimers is estimated in the direction across dimer rows of the surface. The effective charge has a positive sign and does not exceed 15 units of the elementary charge in the temperature range of 1020–1120°C.


2004 ◽  
Vol 10 (1) ◽  
pp. 134-138 ◽  
Author(s):  
Masaki Takeguchi ◽  
Kazutaka Mitsuishi ◽  
Miyoko Tanaka ◽  
Kazuo Furuya

About 1 monolayer of palladium was deposited onto a silicon (111) 7 × 7 surface at a temperature of about 550 K inside an ultrahigh vacuum transmission electron microscope, resulting in formation of Pd2Si nanoislands and a 1 × 1 surface layer. Pd clusters created from an excess of Pd atoms on the 1 × 1 surface layer were directly observed byin situplan view high-resolution transmission electron microscopy. When an objective aperture was introduced so that electron diffractions less than 0.20 nm were filtered out, the lattice structure of the 1 × 1 surface with 0.33 nm spacing and the Pd clusters with a trimer shape were visualized. It was found that image contrast of the 1 × 1 lattice on the specific height terraces disappeared, and thereby an atomic structure of the Pd clusters was clearly observed. The appearance and disappearance of the 1 × 1 lattice was explained by the effect of the kinematical diffraction. It was identified that a Pd cluster was composed of three Pd atoms without a centered Si atom, which is consistent with the model proposed previously. The feature of the Pd clusters stuck at the surface step was also described.


1998 ◽  
Vol 05 (03n04) ◽  
pp. 653-663 ◽  
Author(s):  
Koyu Aoki ◽  
Hiroki Minoda ◽  
Yasumasa Tanishiro ◽  
Katsumichi Yagi

Initial stages of Au adsorption processes on Si(111)-(7 × 7) surfaces at ~780°C, a temperature range where the surface structure undergoes successive phase transitions [(7 × 7)–("1 × 1")–(5×2)–("1 × 1")], were observed in situ by reflection electron microscopy. All of the phase transitions are heterogeneous on the surface and start at surface atomic steps. During Au adsorption on Si(111)-(7 × 7), and subsequently on Si(111)-("1 × 1") surface with wide terraces, steps advance toward the step-down direction. At a Au coverage of ~0.3 ML, the 5 × 2 structure nucleates at step edges, and the nuclei expand both to the lower side terraces and to the higher side terraces. At this stage, an effect of current for heating the specimen was noted. From measurements of such movements of the steps and the domain boundaries, the density of Si atoms in the "1 × 1" phase is estimated to be 1.3–1.7 ML at a Au coverage of ~0.3 ML. Au adsorption on Si(111) surfaces with narrow terraces causes bunching of the steps. After nucleation of the 5 × 2 structure, the bunched [Formula: see text] steps become straight along the [Formula: see text] direction, and are transformed into the (335) facet planes at a Au coverage of 0.50 ML. It was found that the (335) facet planes are stabilized by adsorbed Au atoms. Destruction of the (335) facet is noted at a Au coverage of 0.73 ML.


1986 ◽  
Vol 48 (12) ◽  
pp. 779-781 ◽  
Author(s):  
Kouichirou Honda ◽  
Akira Ohsawa ◽  
Nobuo Toyokura

Sign in / Sign up

Export Citation Format

Share Document