Measurements of Microwave Power Absorbed during ECR Plasma Heating at the L-2M Stellarator

2019 ◽  
Vol 45 (11) ◽  
pp. 1059-1065
Author(s):  
S. E. Grebenshchikov ◽  
N. K. Kharchev ◽  
D. G. Vasilkov
Keyword(s):  
Microwave Power ◽  
Plasma Heating ◽  
Ecr Plasma

ECR Plasma Oxidation: Dependence on Energy of Argon Ion

1999 ◽  
Vol 585 ◽  
Author(s):  
S. Matsuo ◽  
M. Yamamoto ◽  
T. Sadoh ◽  
T. Tsurushima ◽  
D. W. Gao ◽  
...  
Keyword(s):  
Growth Rate ◽  
Flow Rate ◽  
Microwave Power ◽  
Electron Cyclotron Resonance ◽  
Ion Irradiation ◽  
Oxide Films ◽  
Ecr Plasma ◽  
Second Growth ◽  
Argon Ions ◽  
Argon Ion

AbstractEffects of ion-irradiation on oxidation of silicon at low temperatures (130°C) in an argon and oxygen mixed plasma excited by electron cyclotron resonance (ECR) interaction are investigated. First, dependence of energy and flux of incident ions on the flow rate and the microwave power is evaluated. It is shown that the flow rate and the microwave power are key parameters for controlling the energy and the flux of incident ions, respectively. Second, growth kinetics of the oxide films are studied. The growth rate depends on the energy and the flux of argon ions irradiated to the substrate, and the growth thickness increases proportionally to the root square of the oxidation time. Thus, the growth rate is limited by diffusion of oxidants enhanced by irradiation with argon ions. The effect of substrate bias on oxidation characteristics is also discussed. The electrical properties of the oxide films are improved by increasing the bias. The improvement is due to the reduction of damage at the surface of the substrate induced by the irradiation.

A Scanning SXR Spectrometer Used in Experiments on ECR Plasma Heating at the L-2M Stellarator

2018 ◽  
Vol 61 (6) ◽  
pp. 842-848 ◽  
Author(s):  
A. I. Meshcheryakov ◽  
I. Yu. Vafin ◽  
I. A. Grishina
Keyword(s):  
Plasma Heating ◽  
Ecr Plasma

Microwave Setup of a Megawatt Power Level for the ECR Plasma Heating and Current Drive System of the T-15MD Tokamak

2021 ◽  
Author(s):  
G. G. Denisov ◽  
V. I. Malygin ◽  
A. I. Tsvetkov ◽  
A. G. Eremeev ◽  
M.Yu. Shmelev ◽  
...  
Keyword(s):  
Power Level ◽  
Plasma Heating ◽  
Current Drive ◽  
Drive System ◽  
Ecr Plasma

Overview of ECR plasma heating experiment in the GDT magnetic mirror

2015 ◽  
Vol 55 (5) ◽  
pp. 053009 ◽  
Author(s):  
P.A. Bagryansky ◽  
A.V. Anikeev ◽  
G.G. Denisov ◽  
E.D. Gospodchikov ◽  
A.A. Ivanov ◽  
...  
Keyword(s):  
Plasma Heating ◽  
Magnetic Mirror ◽  
Ecr Plasma

Stability and variations of plasma parameters in the L-2M stellarator during excitation of the induction current in the regime of ECR plasma heating

2008 ◽  
Vol 34 (12) ◽  
pp. 979-990 ◽  
Author(s):  
D. K. Akulina ◽  
G. M. Batanov ◽  
M. S. Berezhetskiĭ ◽  
D. G. Vasil’kov ◽  
I. Yu. Vafin ◽  
...  
Keyword(s):  
Plasma Heating ◽  
Plasma Parameters ◽  
Ecr Plasma ◽  
Induction Current
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