Influence of Microwave Power on the Properties of Hydrogenated Diamond-Like Carbon Films Prepared by ECR Plasma Enhanced DC Magnetron Sputtering

2010 ◽  
Vol 12 (5) ◽  
pp. 551-555 ◽  
Author(s):  
Ru Lili ◽  
Huang Jianjun ◽  
Gao Liang ◽  
Qi Bing
Keyword(s):  
Magnetron Sputtering ◽  
Microwave Power ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Dc Magnetron Sputtering ◽  
Ecr Plasma

Diamond like carbon films deposited from graphite target by asymmetric bipolar pulsed-DC magnetron sputtering

2007 ◽  
Vol 16 (4-7) ◽  
pp. 1286-1290 ◽  
Author(s):  
M. Rubio-Roy ◽  
C. Corbella ◽  
J. Garcia-Céspedes ◽  
M.C. Polo ◽  
E. Pascual ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Dc Magnetron Sputtering ◽  
Graphite Target ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Effect of RF Negative Bias on the Structure and Performance of Diamond-Like Carbon Films in ECR Plasma

2013 ◽  
Vol 423-426 ◽  
pp. 756-761
Author(s):  
Li Jun Sang ◽  
Qiang Chen ◽  
Zhong Wei Liu ◽  
Zheng Duo Wang
Keyword(s):  
Friction Coefficient ◽  
Electron Cyclotron Resonance ◽  
Crystalline Silicon ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Negative Bias ◽  
Film Property ◽  
Ecr Plasma ◽  
Peak Intensity ◽  
Stretching Vibration

Diamond-like carbon films (DLC) were deposited on single crystalline silicon surface under different RF negative bias in microwave electron cyclotron resonance (ECR) plasma source. The chemical structure and morphology were characterized by Fourier transformation infrared spectroscopy (FTIR) and atomic force microscopy (AFM). The friction coefficient of films was measured to examine the film property later. The results show that the smooth and compact deposited films were typical hydrogenated diamond-like carbon with CHn stretching vibration in 2800-3000cm-1. It is noticed that with the increase of RF bias on the substrate the peak intensity for C-H stretching vibration in spectrum between 2800cm-1~3000cm-1 increased at the beginning and then decreased, which caused the friction coefficient of the film being smaller and then larger in reverse. In 50W RF biased power one can obtain the maximum-CHn peak intensity and the minimum friction coefficient.

scholarly journals Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

2005 ◽  
Vol 54 (10) ◽  
pp. 4944
Author(s):  
Yang Wu-Bao ◽  
Fan Song-Hua ◽  
Zhang Gu-Ling ◽  
Ma Pei-Ning ◽  
Zhang Shou-Zhong ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering

2003 ◽  
Vol 21 (4) ◽  
pp. 851-859 ◽  
Author(s):  
E. Broitman ◽  
N. Hellgren ◽  
Zs. Czigány ◽  
R. D. Twesten ◽  
J. Luning ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Direct Current Magnetron Sputtering

scholarly journals Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

2008 ◽  
Vol 31 (5) ◽  
pp. 813-818 ◽  
Author(s):  
S. B. Singh ◽  
M. Pandey ◽  
N. Chand ◽  
A. Biswas ◽  
D. Bhattacharya ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Ecr Plasma ◽  
Optical And Mechanical Properties

Effect of helium incorporation on plasma parameters and characteristic properties of hydrogen free carbon films deposited using DC magnetron sputtering

2020 ◽  
Vol 127 (1) ◽  
pp. 014901 ◽  
Author(s):  
Bibhuti B. Sahu ◽  
Sung I. Kim ◽  
Min W. Lee ◽  
Jeon G. Han
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Free Carbon ◽  
Dc Magnetron Sputtering ◽  
Plasma Parameters

Synthesis of hard diamond-like carbon films by double-pulse high-power impulse magnetron sputtering

2020 ◽  
Vol 108 ◽  
pp. 107996 ◽  
Author(s):  
Takashi Kimura ◽  
Kento Sakai
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Carbon Films ◽  
Double Pulse ◽  
Diamond Like Carbon

Deposition of diamond-like carbon films by low energy ion beam and d.c. magnetron sputtering

1991 ◽  
Vol 47 (1-3) ◽  
pp. 188-200 ◽  
Author(s):  
Amarjit Singh ◽  
Pierre Lavigne
Keyword(s):  
Magnetron Sputtering ◽  
Ion Beam ◽  
Carbon Films ◽  
Low Energy ◽  
Diamond Like Carbon
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