Upper estimate of the conversion coefficient in a laser-plasma short-wavelength radiation source for nanolithography

2009 ◽  
Vol 35 (11) ◽  
pp. 1020-1022 ◽  
Author(s):  
S. G. Kalmykov
2017 ◽  
Vol 837 (2) ◽  
pp. L27 ◽  
Author(s):  
Xin Zhang ◽  
Feng Tian ◽  
Yuwei Wang ◽  
Jimy Dudhia ◽  
Ming Chen

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