Measurement of electromagnetic field in a radio frequency inductively coupled plasma at atmospheric pressure

2006 ◽  
Author(s):  
M.A. Razzak ◽  
S. Takamura ◽  
Y. Uesugi ◽  
N. Ohno
Keyword(s):  
Electromagnetic Field ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled

Transition from electrostatic-to-electromagnetic mode in a radio-frequency Ar inductively coupled plasma in atmospheric pressure

2004 ◽  
Vol 95 (2) ◽  
pp. 427-433 ◽  
Author(s):  
M. Abdur Razzak ◽  
Kenji Kondo ◽  
Yoshihiko Uesugi ◽  
Noriyasu Ohno ◽  
Shuichi Takamura
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Inductively Coupled Plasma ◽  
Electromagnetic Mode ◽  
Inductively Coupled

Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

1997 ◽  
Vol 68 (6) ◽  
pp. 2381-2383 ◽  
Author(s):  
K. Eng ◽  
K. Strohmaier ◽  
R. Palmer ◽  
B. Stoner ◽  
S. Washburn
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled

CVD of hard DLC films in a radio frequency inductively coupled plasma source

2001 ◽  
Vol 390 (1-2) ◽  
pp. 98-103 ◽  
Author(s):  
S.J Yu ◽  
Z.F Ding ◽  
J Xu ◽  
J.L Zhang ◽  
T.C Ma
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Inductively Coupled
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