Effect of device structure on signal measurement of zinc oxide nanocolumn-based resonant cavity hydrophones

Hydrophones with three different resonant cavities (microscope slide, cavity with 9.8 mm diameter and 5.7 mm[Formula: see text] curve surface, and cavity with 14 mm diameter and 6.5 mm[Formula: see text] curve surface) and with two different electrode structures (interdigital electrode, without the interdigital electrode but with top–bottom structure) were designed and fabricated. Zinc oxide (ZnO) film was deposited on indium–tin oxide/glass as seed layer and ZnO nanocolumns were grown as the piezoelectric material. Grown ZnO nanocolumns were used in all samples as the sound receiver of all designed hydrophones to enhance the sensing effect and efficiency of fabricated hydrophones. The electrode mask was then adhered on the surfaces of ZnO nanocolumns to complete the electrodes of designed resonant cavity. While measuring the hydrophones without interdigitated electrode, the measurement probes were contacted directly on the substrate and on the top layer of the material. Finally, the resonant cavities in all designed hydrophones were encapsulated using epoxy resin to finish the package of the fabricated hydrophones, and then the sound receiving performance of the hydrophones was evaluated in the water and the results were well compared in this study.