Investigations of N-H and Si-N Bonding Configurations in Hydrogenated Amorphous Silicon Nitride Films by Infrared Absorption Spectroscopy
1985 ◽
Vol 24
(Part 2, No. 11)
◽
pp. L861-L863
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1992 ◽
Vol 31
(Part 1, No. 2A)
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pp. 176-180
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2010 ◽
Vol 55
(18)
◽
pp. 1799-1804
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2008 ◽
Vol 18
(8)
◽
pp. 085001
◽