Low-Temperature Deposition of Hydrogen-Free Silicon Oxynitride without Stress by the Remote Plasma Technique

1990 ◽  
Vol 29 (Part 1, No. 10) ◽  
pp. 2247-2250 ◽  
Author(s):  
Takashi Fuyuki ◽  
Takashi Saitoh ◽  
Hiroyuki Matsunami
Keyword(s):  
Low Temperature ◽  
Silicon Oxynitride ◽  
Remote Plasma ◽  
Plasma Technique ◽  
Free Silicon ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low Temperature Deposition of High‐Quality Silicon Oxynitride (SiON) for OLED Encapsulation via Conventional PECVD

2020 ◽  
Vol 51 (S1) ◽  
pp. 180-183
Author(s):  
Yang Miao ◽  
Jiajia Qian ◽  
Jinchuan Li ◽  
Zhongguo Yang ◽  
Yanying Du ◽  
...  
Keyword(s):  
Low Temperature ◽  
Silicon Oxynitride ◽  
High Quality ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Fabrication of Chitosan-nanohydroxyapatite Scaffolds via Low-temperature Deposition Manufacturing

2011 ◽  
Vol 26 (1) ◽  
pp. 12-16 ◽  
Author(s):  
Xiong-Fei ZHENG ◽  
Wen-Jie ZHAI ◽  
Ying-Chun LIANG ◽  
Tao SUN
Keyword(s):  
Low Temperature ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low temperature deposition of BiFeO3 films on Ti foils for piezoelectric applications

2021 ◽  
Vol 204 ◽  
pp. 114152
Author(s):  
Jing Yan ◽  
Jun Ouyang ◽  
Hongbo Cheng ◽  
Peng Yan
Keyword(s):  
Low Temperature ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low‐temperature deposition of Y‐Ba‐Cu‐O films on a CaF2/GaAs substrate

1989 ◽  
Vol 54 (4) ◽  
pp. 383-385 ◽  
Author(s):  
K. Mizuno ◽  
M. Miyauchi ◽  
K. Setsune ◽  
K. Wasa
Keyword(s):  
Low Temperature ◽  
Gaas Substrate ◽  
Low Temperature Deposition ◽  
Temperature Deposition
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