`NOWEL-2' Variable-Shaped Electron Beam Lithography System for 0.1 µm Patterns with Refocusing and Eddy Current Compensation
1992 ◽
Vol 31
(Part 1, No. 12B)
◽
pp. 4241-4247
◽
Keyword(s):
1993 ◽
Vol 32
(Part 1, No. 12B)
◽
pp. 6012-6017
◽
Keyword(s):
2001 ◽
Vol 19
(2)
◽
pp. 476
◽
Keyword(s):
2016 ◽
Vol 55
(6S1)
◽
pp. 06GL07
◽
Keyword(s):
1981 ◽
Vol 19
(4)
◽
pp. 941-945
◽
1995 ◽
Vol 13
(6)
◽
pp. 2514
◽
Keyword(s):
1987 ◽
Vol 5
(1)
◽
pp. 66
◽
1986 ◽
Vol 4
(1)
◽
pp. 280
◽