Low-Temperature Epitaxial Growth of Silicon and Silicon-Germanium Alloy by Ultrahigh-Vacuum Chemical Vapor Deposition
1994 ◽
Vol 33
(Part 1, No.1A)
◽
pp. 240-246
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2000 ◽
Vol 147
(12)
◽
pp. 4652
◽
Keyword(s):
1996 ◽
Vol 143
(7)
◽
pp. 2361-2364
◽
Keyword(s):
1999 ◽
Vol 17
(1)
◽
pp. 213
◽
2001 ◽
Vol 19
(2)
◽
pp. 323
Keyword(s):
1994 ◽
Vol 139
(1-2)
◽
pp. 15-18
◽
2000 ◽
Vol 39
(Part 2, No. 11A)
◽
pp. L1078-L1080
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Keyword(s):