Polysilicon Thin-Film Transistors Processed at Low Temperature ($\bf \Leq 600^{\circ}C$) Using Solid-Phase Crystallization in Wet Oxygen Atmosphere

1996 ◽  
Vol 35 (Part 2, No. 6A) ◽  
pp. L680-L682 ◽  
Author(s):  
Hiroki Hamada ◽  
Akihumi Sasaki ◽  
Yuji Okita ◽  
Tatuhiko Niina
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Solid Phase ◽  
Oxygen Atmosphere ◽  
Solid Phase Crystallization

Polysilicon Thin Film Transistors

1990 ◽  
Vol 182 ◽  
Author(s):  
Ichio Yudasaka ◽  
Hiroyuki Ohshima
Keyword(s):  
Thin Film ◽  
Thermal Oxidation ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Solid Phase ◽  
Solid Phase Crystallization ◽  
Practical Applications ◽  
Polysilicon Film ◽  
Alternative Technologies ◽  
Low Temperature Processing

AbstractPolysilicon thin film transistors are now in mass production. Key factors of the success are thinner polysilicon film and thermal oxidation. Practical applications of polysilicon thin film transistors have been limited, however, because of high temperature processing. Alternative technologies to thermal oxidation are very low pressure deposition, solid-phase crystallization, laser-annealing and hydrogenation. These technologies are compatible with low temperature processing and will contribute to the advance of polysilicon thin film transistors in the future.

Effects of high pressure annealing on the characteristics of solid phase crystallization poly-Si thin-film transistors

2008 ◽  
Vol 103 (4) ◽  
pp. 044508 ◽  
Author(s):  
Moojin Kim ◽  
Kyoung-Bo Kim ◽  
Ki-Yong Lee ◽  
CheolHo Yu ◽  
Hye-Dong Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
Thin Film Transistors ◽  
Solid Phase ◽  
Solid Phase Crystallization ◽  
Si Thin Film

Thin film transistors fabricated by in situ doped unhydrogenated polysilicon films obtained by solid phase crystallization

2001 ◽  
Vol 16 (11) ◽  
pp. 918-924 ◽  
Author(s):  
L Pichon ◽  
K Mourgues ◽  
F Raoult ◽  
T Mohammed-Brahim ◽  
K Kis-Sion ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Solid Phase ◽  
Solid Phase Crystallization ◽  
Polysilicon Films
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