Polysilicon Thin Film Transistors
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AbstractPolysilicon thin film transistors are now in mass production. Key factors of the success are thinner polysilicon film and thermal oxidation. Practical applications of polysilicon thin film transistors have been limited, however, because of high temperature processing. Alternative technologies to thermal oxidation are very low pressure deposition, solid-phase crystallization, laser-annealing and hydrogenation. These technologies are compatible with low temperature processing and will contribute to the advance of polysilicon thin film transistors in the future.
1998 ◽
Vol 166
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pp. 707-714
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2008 ◽
2016 ◽
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pp. 122-128
1996 ◽
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pp. L680-L682
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2001 ◽
Vol 16
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pp. 918-924
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pp. 111202
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Vol 32
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pp. L1584-L1587
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