Low Temperature (≤550°C) Fabrication of CMOS TFT's on Rapid-Thermal CVD Polycrystalline Silicon-Germanium Films

1997 ◽  
Vol 36 (Part 1, No. 3B) ◽  
pp. 1389-1393 ◽  
Author(s):  
Seo-Kyu Lee ◽  
Seong-Min Choe ◽  
Chang-Geun Ahn ◽  
Wook-Jin Chung ◽  
Young-Kyu Kwon ◽  
...  
Keyword(s):  
Low Temperature ◽  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Thermal Cvd ◽  
Germanium Films

Fabrication of P-Channel MOS TFT's on Rapid Thermal CVD Polycrystalline Silicon-Germanium Films

1996 ◽  
Vol 35 (Part 1, No. 2B) ◽  
pp. 919-922 ◽  
Author(s):  
Seo-Kyu Lee ◽  
Hyung-Geun Kim ◽  
Wook-Jin Chung ◽  
Bong-Koo Kang ◽  
Ohyun Kim
Keyword(s):  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Thermal Cvd ◽  
Germanium Films

Electrical properties of heavily doped polycrystalline silicon-germanium films

1994 ◽  
Vol 41 (2) ◽  
pp. 228-232 ◽  
Author(s):  
T.-J. King ◽  
J.P. McVittie ◽  
K.C. Saraswat ◽  
J.R. Pfiester
Keyword(s):  
Electrical Properties ◽  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Heavily Doped ◽  
Germanium Films

PMOS Thin-Film Transistors Fabricated in RTCVD Polycrystalline Silicon Germanium Films

1995 ◽  
Author(s):  
Seo-Kyu Lee ◽  
Hyung-Geun Kim ◽  
Wook-Jin Chung ◽  
B. K. Kang ◽  
Ohyun Kim
Keyword(s):  
Thin Film ◽  
Silicon Germanium ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Germanium Films

Structure and properties of rapid thermal chemical vapor deposited polycrystalline silicon–germanium films on SiO2 using Si2H6, GeH4, and B2H6 gases

1998 ◽  
Vol 83 (10) ◽  
pp. 5469-5476 ◽  
Author(s):  
V. Z-Q Li ◽  
M. R. Mirabedini ◽  
B. E. Hornung ◽  
H. H. Heinisch ◽  
M. Xu ◽  
...  
Keyword(s):  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Chemical Vapor ◽  
Structure And Properties ◽  
Chemical Vapor Deposited ◽  
Germanium Films

PMOS transistors in LPCVD polycrystalline silicon-germanium films

1991 ◽  
Vol 12 (11) ◽  
pp. 584-586 ◽  
Author(s):  
T.-J. King ◽  
K.C. Saraswat ◽  
J.R. Pfiester
Keyword(s):  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Germanium Films

Rapid thermal oxidation of radio frequency sputtered polycrystalline silicon germanium films

2002 ◽  
Vol 91 (4) ◽  
pp. 2443-2448 ◽  
Author(s):  
W. K. Choi ◽  
A. Natarajan ◽  
L. K. Bera ◽  
A. T. S. Wee ◽  
Y. J. Liu
Keyword(s):  
Radio Frequency ◽  
Thermal Oxidation ◽  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Rapid Thermal Oxidation ◽  
Germanium Films

Polycrystalline silicon-germanium films for integrated microsystems

2003 ◽  
Vol 12 (2) ◽  
pp. 160-171 ◽  
Author(s):  
A.E. Franke ◽  
J.M. Heck ◽  
Tsu-Jae King ◽  
R.T. Howe
Keyword(s):  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Integrated Microsystems ◽  
Germanium Films

Microstructural characterization of rf sputtered polycrystalline silicon germanium films

2002 ◽  
Vol 91 (1) ◽  
pp. 444 ◽  
Author(s):  
W. K. Choi ◽  
L. K. Teh ◽  
L. K. Bera ◽  
W. K. Chim ◽  
A. T. S Wee ◽  
...  
Keyword(s):  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Microstructural Characterization ◽  
Germanium Films
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