Defect Characterization of Sputter Deposited Au Contacts on N-TypeSi1-xGex

1997 ◽  
Vol 36 (Part 1, No. 2) ◽  
pp. 633-637
Author(s):  
Stewart A. Goodman ◽  
F. D. Auret
Keyword(s):  
Defect Characterization ◽  
Sputter Deposited

Defect Characterization of the Structure-Growth Zone-Model for Sputter Deposited Cu Films

2004 ◽  
Vol 445-446 ◽  
pp. 69-71 ◽  
Author(s):  
Jérémie De Baerdemaeker ◽  
Charles Dauwe ◽  
Danny Segers ◽  
Christophe Detavernier ◽  
D. Deduytsche ◽  
...  
Keyword(s):  
Growth Zone ◽  
Zone Model ◽  
Defect Characterization ◽  
Cu Films ◽  
Sputter Deposited

Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films

2002 ◽  
Vol 92 (1) ◽  
pp. 310-319 ◽  
Author(s):  
David L. Young ◽  
Helio Moutinho ◽  
Yanfa Yan ◽  
Timothy J. Coutts
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zinc Stannate ◽  
Magnetron Sputter ◽  
Sputter Deposited

Characterization of sputter-deposited multilayers of Ni and Zr with APFIM/TAP

1996 ◽  
Vol 94-95 ◽  
pp. 306-312 ◽  
Author(s):  
T. Al-Kassab ◽  
M.-P. Macht ◽  
V. Naundorf ◽  
H. Wollenberger ◽  
S. Chambreland ◽  
...  
Keyword(s):  
Sputter Deposited

Defect characterization of CdTe thin films using a slow positron beam

2007 ◽  
Vol 4 (10) ◽  
pp. 3659-3663 ◽  
Author(s):  
S. Neretina ◽  
D. Grebennikov ◽  
R. A. Hughes ◽  
M. Weber ◽  
K. G. Lynn ◽  
...  
Keyword(s):  
Thin Films ◽  
Positron Beam ◽  
Defect Characterization ◽  
Slow Positron ◽  
Cdte Thin Films

Subwavelength Defect Characterization Using Guided Wave Scattering Matrix

2013 ◽  
Vol 330 ◽  
pp. 504-509
Author(s):  
Yang Zheng ◽  
Jin Jie Zhou ◽  
Hui Zheng
Keyword(s):  
Wave Scattering ◽  
Scattering Matrix ◽  
Guided Wave ◽  
Defect Characterization ◽  
Challenging Problem ◽  
Recognition Method ◽  
Quantitative Characterization ◽  
S Matrix ◽  
Imaging Algorithms

Although many imaging algorithms such as ellipse and hyperbola algorithm can roughly locate defects in large plate-like structures with sparse guided wave arrays, quantitative characterization of them is still a challenging problem, especially for those small defects known as subwavelength defects. Scattering signals of defects contain abundant information so that can be used to evaluate defects. A defects recognition method using the S-matrix (scattering matrix) was presented. S-matrices of hole and crack with S0 mode incident were experimentally measured. The results show that defects can be recognized from the morphology of 2D S-matrix chart. This method has great potential to achieve more specific parameters of small defects with sparse guided wave arrays.

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