High-Quality GaAsxP1-x/In0.13Ga0.87P Quantum Well Structure Grown on Si Substrate with a Very Few Threading Dislocations

1999 ◽  
Vol 38 (Part 1, No. 12A) ◽  
pp. 6645-6649 ◽  
Author(s):  
Yasuhiro Fujimoto ◽  
Hiroo Yonezu ◽  
Satoshi Irino ◽  
Katsuya Samonji ◽  
Kenji Momose ◽  
...  
2001 ◽  
Vol 79 (9) ◽  
pp. 1306-1308 ◽  
Author(s):  
Yasuhiro Fujimoto ◽  
Hiroo Yonezu ◽  
Atsushi Utsumi ◽  
Kenji Momose ◽  
Yuzo Furukawa

1997 ◽  
Vol 36 (Part 1, No. 3B) ◽  
pp. 1961-1965 ◽  
Author(s):  
Akihiko Ishibashi ◽  
Hidemi Takeishi ◽  
Nobuyuki Uemura ◽  
Masahiro Kume ◽  
Yasufumi Yabuuchi ◽  
...  

1996 ◽  
Author(s):  
Akihiko ISHIBASHI ◽  
Hidemi TAKEISHI ◽  
Nobuyuki UEMURA ◽  
Masahiro KUME ◽  
Yuzaburoh BAN

2004 ◽  
Vol 44 (1) ◽  
pp. L15-L17 ◽  
Author(s):  
Kouichi Akahane ◽  
Naokatsu Yamamoto ◽  
Shin-ichiro Gozu ◽  
Naoki Ohtani

1987 ◽  
Vol 102 ◽  
Author(s):  
L. J. Schowalter ◽  
Shin Hashimoto ◽  
G. A. Smith ◽  
W. M. Gibson ◽  
N. Lewis ◽  
...  

ABSTRACTIn this paper, ion channeling techniques are used to show that epitaxial GaAs layers grown on vicinal Si(001) wafers do not have their [001] axis precisely aligned with that of the Si substrate. Instead, the [001] axis of the GaAs layer is found to be tilted toward the surface normal of the Si substrate. This tilt was found to be ∼0.2° on vicinal Si(001) substrates which have their [001] axis tilted 4° toward the [110] azimuth. It is speculated that this misalignment is reponsible for the residual density of threading dislocations in the GaAs on Si layer. An approach described here, which can be used to avoid strain in the GaAs layer, is to grow a CaF2 buffer layer between the Si substrate and the epitaxial GaAs layer. High quality epitaxial GaAs layers have been obtained on both CaF 2 /Si(001) and CaF 2 /Si(111) substrates. Strain measurements of the epitaxial GaAs on the CaF 2 buffer layers indicate that these layers have strains below our detection limits.


1994 ◽  
Vol 22 (12) ◽  
pp. 977-984
Author(s):  
Yoshiaki HASEGAWA ◽  
Takashi EGAWA ◽  
Takashi JIMBO ◽  
Masayoshi UMENO

1989 ◽  
Vol 25 (17) ◽  
pp. 1147
Author(s):  
A.L. Powell ◽  
J.S. Roberts ◽  
P.I. Rockett ◽  
T.J. Foster ◽  
L. Eaves

2005 ◽  
Vol 34 (1) ◽  
pp. 23-26 ◽  
Author(s):  
Edward Y. Chang ◽  
Tsung-Hsi Yang ◽  
Guangli Luo ◽  
Chun-Yen Chang

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